From seymour at snf.stanford.edu Tue Feb 5 08:16:17 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 5, 2002 8:16:17 AM Subject: Problem tylannitride 2002-01-29 08:25:57: DCS flow problems on cold nights Message-ID: The DCS flow has been good for the last week. From mbadi at snf.stanford.edu Thu Feb 7 02:41:25 2002 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Feb 7, 2002 2:41:25 AM Subject: Shutdown tylannitride 2002-02-07 02:41:24: boat doesn't come out Message-ID: at the end of the run the tube sat there for 10 mins in step 115. i finally alarm ack'd the tube to end the program. a manual pull didn't do anything. i tried starting another LONH378 run to get the tube to pull out but no luck. i gave up and ran pump10. please note that there are 14 process wafers (sandwhiched with 4 baffles) currenlty in the tube. if i'm not around when the tube does come out (ray works his magic...) could you please just put the 14 wafers in a diff cassette for me? thanks. From seymour at snf.stanford.edu Thu Feb 7 08:57:42 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 7, 2002 8:57:42 AM Subject: Shutdown tylannitride 2002-02-07 02:41:24: boat doesn't come out Message-ID: replaced slow pump line and did a leak check, it passed. From rohits at snf.stanford.edu Fri Feb 15 01:41:51 2002 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Feb 15, 2002 1:41:51 AM Subject: Shutdown tylannitride 2002-02-15 01:41:49: possible metal contamination Message-ID: Wafers were handled with metal contaminated tweezers before the diff clean. Also, the non-metal wand on this bank would need to be considered as possibly metal contaminated. From gladys at snf.stanford.edu Fri Feb 15 11:03:37 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Feb 15, 2002 11:03:37 AM Subject: Shutdown tylannitride 2002-02-15 01:41:49: possible metal contamination...tube coated w/ 2000A Message-ID: From seymour at snf.stanford.edu Mon Feb 25 02:11:06 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 25, 2002 2:11:06 PM Subject: Shutdown tylannitride 2002-02-25 14:11:04: faulty valve replaced on NH3 purge panel Message-ID: under leak test untill tomorrow. From seymour at snf.stanford.edu Mon Feb 25 02:11:21 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 25, 2002 2:11:21 PM Subject: Shutdown tylannitride 2002-02-23 22:14:53: NH3 leak ingas bunker, bad valve Message-ID: From seymour at snf.stanford.edu Mon Feb 25 02:11:37 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 25, 2002 2:11:37 PM Subject: Shutdown tylannitride 2002-02-25 14:11:04: faulty valve replaced on NH3 purge panel Message-ID: From seymour at snf.stanford.edu Mon Feb 25 02:12:46 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 25, 2002 2:12:46 PM Subject: Shutdown tylannitride 2002-02-25 14:12:44: replaced faulty NH3 valve on purge panel Message-ID: under leak test at this time until tomorrow. From gladys at snf.stanford.edu Tue Feb 26 05:13:49 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Feb 26, 2002 5:13:49 PM Subject: Shutdown tylannitride 2002-02-25 14:12:44: replaced faulty NH3 valve on purge panel: testrun completed Message-ID: