Shutdown tylannitride 2002-02-07 02:41:24: boat doesn't come out
mbadi at snf.stanford.edu
mbadi at snf.stanford.edu
Thu Feb 7 02:41:25 PST 2002
at the end of the run the tube sat there for 10 mins in step 115. i finally alarm ack'd the tube to end the program. a manual pull didn't do anything. i tried starting another LONH378 run to get the tube to pull out but no luck. i gave up and ran pump10. please note that there are 14 process wafers (sandwhiched with 4 baffles) currenlty in the tube. if i'm not around when the tube does come out (ray works his magic...) could you please just put the 14 wafers in a diff cassette for me? thanks.
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