Shutdown tylannitride 2002-02-15 01:41:49: possible metal contamination

rohits at snf.stanford.edu rohits at snf.stanford.edu
Fri Feb 15 01:41:51 PST 2002


Wafers were handled with metal contaminated tweezers
before the diff clean. Also, the non-metal wand on this 
bank would need to be considered as possibly metal
contaminated.




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