From seymour at snf.stanford.edu Wed Jan 2 10:01:38 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 2, 2002 10:01:38 AM Subject: Shutdown tylannitride 2002-01-02 10:01:37: diclor cylinder change Message-ID: the line is under leak check after changing the cylinder. the system will be back up tomorror morning if all is okay. From seymour at snf.stanford.edu Fri Jan 4 10:29:15 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 4, 2002 10:29:15 AM Subject: Problem tylannitride 2001-12-09 05:23:56: Intermittent Problem: MFS Alarm/PrcPr=80/DCS=0 Message-ID: has been running ok. From seymour at snf.stanford.edu Fri Jan 4 10:30:06 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 4, 2002 10:30:06 AM Subject: Shutdown tylannitride 2002-01-02 10:01:37: diclor cylinder change Message-ID: passed leak check From seymour at snf.stanford.edu Fri Jan 4 10:30:51 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 4, 2002 10:30:51 AM Subject: Problem tylannitride 2001-11-29 16:48:28: Process pressure high! Message-ID: duplicate entry From seymour at snf.stanford.edu Fri Jan 4 10:31:39 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 4, 2002 10:31:39 AM Subject: Shutdown tylannitride 2002-01-04 10:31:39: Needs testing after NH3 and Diclor change Message-ID: From gladys at snf.stanford.edu Fri Jan 4 05:39:58 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jan 4, 2002 5:39:58 PM Subject: Shutdown tylannitride 2002-01-04 10:31:39: Needs testing after NH3 and Diclor change Message-ID: testrun was completed...gas flows were ok From casey at snf.stanford.edu Fri Jan 18 07:06:27 2002 From: casey at snf.stanford.edu (casey at snf.stanford.edu) Date: Jan 18, 2002 7:06:27 AM Subject: Problem tylannitride 2002-01-18 07:06:26: MFS alarm sounding Message-ID: I came back to check on my process and the MFS alarm was going off. There was also an alarm on the poly tube which I acknowlwedged, just to shut it up. From shott at snf.stanford.edu Fri Jan 18 07:52:28 2002 From: shott at snf.stanford.edu (John Shott) Date: Fri, 18 Jan 2002 07:52:28 -0800 Subject: Problem tylannitride 2002-01-18 07:06:26: MFS alarm sounding Message-ID: <3C4844BC.77CABA2A@snf.stanford.edu> Tylan nitride folks: Hmmm .... MFC alarm in a tube running DCS overnight on the coldest night of the year? Sounds suspiciously like DCS condensation in the line ... these are the optimum conditions to monitor the DCS lines to see if we are happy with our current heating strategy and technology. John From seymour at snf.stanford.edu Tue Jan 22 08:50:16 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 22, 2002 8:50:16 AM Subject: Problem tylannitride 2002-01-18 07:06:26: MFS alarm sounding Message-ID: checked out the DCS. The system has been operating since this write up so I will remove the problem status. From gladys at snf.stanford.edu Wed Jan 23 07:26:12 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jan 23, 2002 7:26:12 AM Subject: Shutdown tylannitride 2002-01-23 07:26:11: down for tube clean Message-ID: From mdickey at snf.stanford.edu Thu Jan 24 08:06:29 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Jan 24, 2002 8:06:29 AM Subject: Shutdown tylannitride 2002-01-23 07:26:11: down for tube clean Message-ID: Pull and clean is done, leak check good, ready for testing From gladys at snf.stanford.edu Thu Jan 24 08:15:35 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jan 24, 2002 8:15:35 AM Subject: Shutdown tylannitride 2002-01-24 08:15:34: waiting for test Message-ID: From latta at snf.stanford.edu Thu Jan 24 04:13:17 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 24, 2002 4:13:17 PM Subject: Shutdown tylannitride 2002-01-24 08:15:34: waiting for test Message-ID: Test run results; Expected 2500A 2.37 Got 2698 2.362 From mcconnel at snf.stanford.edu Sat Jan 26 07:14:18 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Jan 26, 2002 7:14:18 PM Subject: Problem tylannitride 2002-01-26 19:14:18: DSC Flow alarm Message-ID: About 15 minutes into a one hour deposition, there was a DSC flow interlock alarm. The DSC flow rate went to zero, so no further deposition occurred (I had been expecting to deposit 2000 Angstroms in one hour but instead only deposited 500 Angstroms). From seymour at snf.stanford.edu Tue Jan 29 07:59:31 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 29, 2002 7:59:31 AM Subject: Shutdown tylannitride 2002-01-29 07:59:29: checking diclor line Message-ID: From seymour at snf.stanford.edu Tue Jan 29 08:16:59 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 29, 2002 8:16:59 AM Subject: Shutdown tylannitride 2002-01-29 07:59:29: checking diclor line Message-ID: diclor line check complete, the line looks good. From seymour at snf.stanford.edu Tue Jan 29 08:25:08 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 29, 2002 8:25:08 AM Subject: Problem tylannitride 2002-01-26 19:14:18: DSC Flow alarm Message-ID: checked lines and flow was okay From seymour at snf.stanford.edu Tue Jan 29 08:25:59 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 29, 2002 8:25:59 AM Subject: Problem tylannitride 2002-01-29 08:25:57: DCS flow problems on cold nights Message-ID: