Problem tylannitride 2002-01-26 19:14:18: DSC Flow alarm

mcconnel at snf.stanford.edu mcconnel at snf.stanford.edu
Sat Jan 26 07:14:18 PST 2002


About 15 minutes into a one hour deposition, there was a DSC flow interlock alarm.  The DSC flow rate went to zero, so no further deposition occurred (I had been expecting to deposit 2000 Angstroms in one hour but instead only deposited 500 Angstroms).




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