Problem tylannitride 2002-01-26 19:14:18: DSC Flow alarm

mcconnel at mcconnel at
Sat Jan 26 07:14:18 PST 2002

About 15 minutes into a one hour deposition, there was a DSC flow interlock alarm.  The DSC flow rate went to zero, so no further deposition occurred (I had been expecting to deposit 2000 Angstroms in one hour but instead only deposited 500 Angstroms).

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