Problem tylannitride 2002-07-27 18:08:41: leak check fail and MFS alarm
yyao at snf.stanford.edu
yyao at snf.stanford.edu
Sat Jul 27 06:08:41 PDT 2002
I did two runs today. For both runs, leak check didn't pass at the beginning. I aborted the process and rerun then everything went through.
Everytime when it got to step 110, there was a MFS alarm.
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