From seymour at snf.stanford.edu Mon Jun 3 07:58:00 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 3, 2002 7:58:00 AM Subject: Shutdown tylannitride 2002-06-03 07:57:58: purging DCS line with N@ Message-ID: From seymour at snf.stanford.edu Tue Jun 4 11:25:07 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 4, 2002 11:25:07 AM Subject: Problem tylannitride 2002-05-02 14:47:41: MFS Alarms (two runs in a row) Message-ID: DCS MFC changed From seymour at snf.stanford.edu Tue Jun 4 11:25:22 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 4, 2002 11:25:22 AM Subject: Problem tylannitride 2002-05-05 19:48:30: MFS Alarm: LONH378 R/I = 2.05 Message-ID: DCS MFC changed From seymour at snf.stanford.edu Tue Jun 4 11:25:42 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 4, 2002 11:25:42 AM Subject: Problem tylannitride 2002-05-26 15:51:20: FMS alarm short run, crummy filmDCS MFC changed Message-ID: From seymour at snf.stanford.edu Tue Jun 4 11:26:12 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 4, 2002 11:26:12 AM Subject: Shutdown tylannitride 2002-06-03 07:57:58: purging DCS line with N@ Message-ID: DCS MFC CHANGED Line charged with DCS From seymour at snf.stanford.edu Tue Jun 4 11:26:57 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 4, 2002 11:26:57 AM Subject: Shutdown tylannitride 2002-06-04 11:26:56: Needs test after DCS MFC change Message-ID: From latta at snf.stanford.edu Wed Jun 5 04:43:07 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 5, 2002 4:43:07 PM Subject: Shutdown tylannitride 2002-06-04 11:26:56: Needs test after DCS MFC change Message-ID: Results from ellipsometry and stress testing of LS Nirtride after DCS MFC change out are: Ellisometer Wafer 1 Wafer 10 C 5034 C 4847 T 5093 T 4943 R 5115 R 4917 B 5098 B 4961 L 5100 RI 2.38 B4962 RI 2.38 Stress wafer1 = 116.33 Stress wafer 10 = 93.45 Thanks to Uli and Gladys for measurements. From tberg at snf.stanford.edu Mon Jun 10 06:49:14 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jun 10, 2002 6:49:14 AM Subject: Shutdown tylannitride 2002-06-10 06:49:13: Burn Box Clean Message-ID: System down for burn box clean From tberg at snf.stanford.edu Mon Jun 10 09:46:24 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jun 10, 2002 9:46:24 AM Subject: Shutdown tylannitride 2002-06-10 06:49:13: Burn Box Clean Message-ID: Burn box clean completed system back in pump From liji at snf.stanford.edu Sat Jun 22 11:14:29 2002 From: liji at snf.stanford.edu (liji at snf.stanford.edu) Date: Jun 22, 2002 11:14:29 AM Subject: Problem tylannitride 2002-06-22 11:14:28: Boat didnot come out after vent for 50 min. Message-ID: Tried to pump down and vent again for 35 min, boat still didnot come out. Purge pressure ect were normal From yyao at snf.stanford.edu Mon Jun 24 02:19:39 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jun 24, 2002 2:19:39 PM Subject: Problem tylannitride 2002-06-24 14:19:37: Boat is stuck when it goes in Message-ID: From seymour at snf.stanford.edu Tue Jun 25 07:25:47 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 25, 2002 7:25:47 AM Subject: Problem tylannitride 2002-06-24 14:19:37: Boat is stuck when it goes in Message-ID: Loader drive pully set screw loose on shaft. Ok now From seymour at snf.stanford.edu Tue Jun 25 07:26:14 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 25, 2002 7:26:14 AM Subject: Problem tylannitride 2002-06-22 11:14:28: Boat didnot come out after vent for 50 min. Message-ID: Loader drive pully slipping on shaft. From xiangli at snf.stanford.edu Sun Jun 30 06:35:00 2002 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Jun 30, 2002 6:35:00 PM Subject: Problem tylannitride 2002-06-30 18:34:59: Venting doesnt work Message-ID: After stopping the pump10 and waiting for 20 min, the tube doesnt come out by pressing manual, fast and out. I and the person who was working on this machine previous to me have the same problem though he temporally fix and and got a bad deposition result.