Shutdown tylannitride 2002-06-04 11:26:56: Needs test after DCS MFC change

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Jun 5 04:43:07 PDT 2002


Results from ellipsometry and stress testing of LS Nirtride
after DCS MFC change out are:
Ellisometer
Wafer 1		Wafer 10
C 5034		C 4847
T 5093		T 4943
R 5115		R 4917
B 5098		B 4961
L 5100  RI 2.38		B4962  RI 2.38
Stress wafer1 = 116.33
Stress wafer 10 = 93.45
Thanks to Uli and Gladys for measurements.




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