Problem tylannitride 2002-06-30 18:34:59: Venting doesnt work

xiangli at snf.stanford.edu xiangli at snf.stanford.edu
Sun Jun 30 06:35:00 PDT 2002


After stopping the pump10 and waiting for 20 min, the tube doesnt come out by pressing manual, fast and out. I and the person who was working on this machine previous to me have the same problem though he temporally fix and and got a bad deposition result. 




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