From hansen at snf.stanford.edu Thu May 2 02:47:42 2002 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: May 2, 2002 2:47:42 PM Subject: Problem tylannitride 2002-05-02 14:47:41: MFS Alarms (two runs in a row) Message-ID: During two consecutive nitride depositions, our process was interrupted by MFS alarms somewhere between 2 and 3 hours into the process. Ted cleared the MFS alarms before we arrived to collect the wafers and noted that the DCS had turned off, but that the line pressures and flows appeared okay before and after the runs. The first alarm happened in the middle of the night and we were both asleep, so we do not have a record except what is logged on crystal. In the second consecutive run, a similar (or the same) problem occurred, even though the temperature outside was quite warm between 11 AM and noon. We hope this problem is further investigated, as the research of our group relies on long nitride depositions. It is not efficient use of the machine to have to deposit in many short, closely supervised runs. In addition, if the gas flows do not shut off cleanly, we risk ruining days or weeks of work with a poor quality film. If you have further questions please contact us. -Sean Hansen (hansen at snf) -Edward Haeggstrom (edwardh at snf) From seymour at snf.stanford.edu Thu May 2 03:11:15 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 2, 2002 3:11:15 PM Subject: Comment tylannitride 2002-05-02 15:11:15: diclor Message-ID: system running ok at this time. please continue to check system status during long depositions From hector at snf.stanford.edu Sun May 5 07:48:31 2002 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: May 5, 2002 7:48:31 PM Subject: Problem tylannitride 2002-05-05 19:48:30: MFS Alarm: LONH378 R/I = 2.05 Message-ID: From ericp at snf.stanford.edu Sun May 26 03:51:21 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: May 26, 2002 3:51:21 PM Subject: Problem tylannitride 2002-05-26 15:51:20: FMS alarm short run, crummy film Message-ID: Same old. I did a relatively short (0.5 micron) run and got the DCS MFS alarm, and the film is garbage. Do we know what this film IS, so that we can try to strip it and recover the wafers?