Problem tylannitride 2002-05-26 15:51:20: FMS alarm short run, crummy film

ericp at ericp at
Sun May 26 03:51:21 PDT 2002

Same old.  
I did a relatively short (0.5 micron) run and got
the DCS MFS alarm, and the film is garbage. 
Do we know what this film IS, so that we can try 
to strip it and recover the wafers?  

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