From crichter at snf.stanford.edu Fri Nov 1 03:05:48 2002 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Nov 1, 2002 3:05:48 PM Subject: Problem tylannitride 2002-11-01 15:05:48: MFC Alarm NH3 flow below setpoint Message-ID: From seymour at snf.stanford.edu Fri Nov 1 03:47:01 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Nov 1, 2002 3:47:01 PM Subject: Problem tylannitride 2002-11-01 15:05:48: MFC Alarm NH3 flow below setpoint Message-ID: the alarm was for n2backfill not at zero. The loNH3 is flowing 14.2 sccm, setpoint is 13.5 sccm From seymour at snf.stanford.edu Fri Nov 1 03:48:50 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Nov 1, 2002 3:48:50 PM Subject: Comment tylannitride 2002-11-01 15:48:49: n2 backflow fault alarm due to a small above zero reading Message-ID: I unpluged the MFC and pluged it back in and the alarm has been silent for about 40 mins. From rfasch at snf.stanford.edu Tue Nov 5 06:00:06 2002 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Nov 5, 2002 6:00:06 AM Subject: Shutdown tylannitride 2002-11-05 06:00:05: tube is pulled Message-ID: From seymour at snf.stanford.edu Tue Nov 5 10:46:22 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Nov 5, 2002 10:46:22 AM Subject: Shutdown tylannitride 2002-11-05 06:00:05: tube is pulled Message-ID: pull and clean completed. oil and filter changed From seymour at snf.stanford.edu Tue Nov 5 10:46:51 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Nov 5, 2002 10:46:51 AM Subject: Shutdown tylannitride 2002-11-05 10:46:50: needs test or coat after pull and clean Message-ID: From latta at snf.stanford.edu Tue Nov 5 16:37:34 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 05 Nov 2002 16:37:34 -0800 Subject: Test run results Message-ID: <3DC8644E.C2A7534A@snf.stanford.edu> LONH378 run for 00:30:00 F 635/2.150 631/2.14 631/2.145 629/2.14 633/2.146 #2 694/2.197 694/2.195 696/2.196 697/2.197 694/2.195 #3 718/2.22 717/2.219 719/2.22 721/2.22 719/2.219 B 732/2.258 734/2.256 736/2.258 737/2.257 734/2.255 Process pressure 415mT. Dep rate 23A/min. -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From latta at snf.stanford.edu Tue Nov 5 16:54:38 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 05 Nov 2002 16:54:38 -0800 Subject: Results- mea culpa! Message-ID: <3DC8684E.B6A4E9CB@snf.stanford.edu> Folks, I fogot the position header on the last message. Here's how it should read.... LONH378 run for 00:30:00 Wf Center Bottom Right Top Left F 635/2.150 631/2.14 631/2.145 629/2.14 633/2.146 #2 694/2.197 694/2.195 696/2.196 697/2.197 694/2.195 #3 718/2.22 717/2.219 719/2.22 721/2.22 719/2.219 B 732/2.258 734/2.256 736/2.258 737/2.257 734/2.255 Process pressure 415mT. Dep rate 23A/min. -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From mdickey at snf.stanford.edu Wed Nov 6 01:32:58 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 6, 2002 1:32:58 PM Subject: Comment tylannitride 2002-11-06 13:32:57: Replaced tube Message-ID: Tube has been replaced. It is leak tight and when it reaches temp. it will be ready for testing From maurice at snf.stanford.edu Thu Nov 7 15:05:09 2002 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Thu, 07 Nov 2002 15:05:09 -0800 Subject: nitride readings 11/7/02 Message-ID: <3DCAF1A5.3DCA1DE0@snf.stanford.edu> Hey gang, Here is the latest. LONH378 run for 00:30:00 Wf Center Bottom Right Top Left F 912/2.316 916/2.314 914/2.315 912/2.316 913/2.315 #2 879/2.345 879/2.345 885/2.342 879/2.344 880/2.345 #3 862/2.363 876/2.361 881/2.358 876/2.359 872/2.362 B 831/2.384 840/2.384 833/2.383 832/2.383 837/2.385 From maurice at snf.stanford.edu Thu Nov 7 03:09:06 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Nov 7, 2002 3:09:06 PM Subject: Shutdown tylannitride 2002-11-05 10:46:50: needs test or coat after pull and clean Message-ID: test complete. results are posted in the archive. From quickwin at snf.stanford.edu Fri Nov 8 01:23:50 2002 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Nov 8, 2002 1:23:50 AM Subject: Problem tylannitride 2002-11-08 01:23:48: "power fail" error Message-ID: I got "Power Fail" error twice during my deposition and it caused me to start over once. From mdickey at snf.stanford.edu Thu Nov 21 08:07:32 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 21, 2002 8:07:32 AM Subject: Shutdown tylannitride 2002-11-21 08:07:31: BOTTLE CHANGE Message-ID: The DCS bottle has been changed. The tube should be ready for use tomorrow morning after leak check has passed From mdickey at snf.stanford.edu Fri Nov 22 07:54:40 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 22, 2002 7:54:40 AM Subject: Comment tylannitride 2002-11-22 07:54:38: Botte change Message-ID: The DCS bottle is back on line, system needs testing From mdickey at snf.stanford.edu Fri Nov 22 07:54:56 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 22, 2002 7:54:56 AM Subject: Shutdown tylannitride 2002-11-21 08:07:31: BOTTLE CHANGE Message-ID: DCS bottle is back on line From mdickey at snf.stanford.edu Fri Nov 22 07:55:59 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 22, 2002 7:55:59 AM Subject: Shutdown tylannitride 2002-11-22 07:55:56: test Message-ID: System needs test after DCS bottle change From maurice at snf.stanford.edu Fri Nov 22 14:54:02 2002 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Fri, 22 Nov 2002 14:54:02 -0800 Subject: Uniformity good Green light Message-ID: <3DDEB58A.F4994911@snf.stanford.edu> After the tube clean, a 30 min dep of program "NEWLSN" (new load stress nitride) was run. Across wafer uniformity was 3% or less. Center point uniformity in first boat was 1.36% Center point uniformity across both boats was 9.0% Results below: boat 1 cent top bott righ left wafer1 2888 2928 2932 2963 2945 wafer2 2875 2959 2924 2942 2963 wafer3 2861 2919 2895 2907 2942 boat2 wafer1 2645 2726 2676 2666 2718 wafer2 2638 2701 2676 2683 2717 -maurice From maurice at snf.stanford.edu Fri Nov 22 02:55:40 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Nov 22, 2002 2:55:40 PM Subject: Shutdown tylannitride 2002-11-22 07:55:56: uniformity good... green light Message-ID: