From mcp at snf.stanford.edu Wed Oct 9 10:55:31 2002 From: mcp at snf.stanford.edu (mcp at snf.stanford.edu) Date: Oct 9, 2002 10:55:31 AM Subject: Problem tylannitride 2002-10-09 10:55:30: Pressure check failure Message-ID: Hi! The last person to use the machine before me failed to load or run the pump10 program. I started a run at ~10 AM, and had it crap out after the presure check (nitride2, step 35). Presumably, it's only outgassing, so I loaded the pump10 program and set running. Mark From seymour at snf.stanford.edu Wed Oct 9 11:48:08 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 9, 2002 11:48:08 AM Subject: Problem tylannitride 2002-10-09 10:55:30: Pressure check failure Message-ID: started pump recipe pumped tube for about 10 min then did a manual leck check and it was ok. restarted pump10 system is ok to use From crichter at snf.stanford.edu Wed Oct 23 06:57:23 2002 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Oct 23, 2002 6:57:23 PM Subject: Problem tylannitride 2002-10-23 18:57:22: pully motor does not stop Message-ID: After unloading the wafers and pressing the ACK button, the conveyer belt stopped once tube was closed, however, the pully motor continues to rotate. From seymour at snf.stanford.edu Thu Oct 24 11:14:55 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 24, 2002 11:14:55 AM Subject: Shutdown tylannitride 2002-10-24 11:14:54: tube wo n't open Message-ID: From seymour at snf.stanford.edu Thu Oct 24 11:20:43 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 24, 2002 11:20:43 AM Subject: Shutdown tylannitride 2002-10-24 11:14:54: tube wo n't open Message-ID: tube opened normally when I tried in manual and in auto From crichter at snf.stanford.edu Thu Oct 24 06:27:16 2002 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Oct 24, 2002 6:27:16 PM Subject: Problem tylannitride 2002-10-24 18:27:16: pully motor still rotates after tube closes Message-ID: Tube opened with no problems after program run. Tube was closed by pressing ACK twice. After running the pump10 program, the pully motor began to rotate. From seymour at snf.stanford.edu Fri Oct 25 08:26:39 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 8:26:39 AM Subject: Shutdown tylannitride 2002-10-25 08:26:38: burnbox needs cleaning Message-ID: From seymour at snf.stanford.edu Fri Oct 25 09:28:02 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 9:28:02 AM Subject: Shutdown tylannitride 2002-10-25 08:26:38: burnbox needs cleaning Message-ID: burn box cleaned From seymour at snf.stanford.edu Fri Oct 25 09:37:09 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 9:37:09 AM Subject: Shutdown tylannitride 2002-10-25 09:37:08: checking loader problem Message-ID: From seymour at snf.stanford.edu Fri Oct 25 09:51:32 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 9:51:32 AM Subject: Shutdown tylannitride 2002-10-25 09:37:08: checking loader problem Message-ID: loader worked as designed, stopped driving about 40 sec after first front sensor made. From seymour at snf.stanford.edu Fri Oct 25 09:51:54 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 9:51:54 AM Subject: Problem tylannitride 2002-10-24 18:27:16: pully motor still rotates after tube closes Message-ID: works as designed From seymour at snf.stanford.edu Fri Oct 25 09:52:18 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 25, 2002 9:52:18 AM Subject: Problem tylannitride 2002-10-23 18:57:22: pully motor does not stop Message-ID: works as designed