Problem tylannitride 2002-10-23 18:57:22: pully motor does not stop

crichter at snf.stanford.edu crichter at snf.stanford.edu
Wed Oct 23 06:57:23 PDT 2002


After unloading the wafers and pressing the ACK button, the conveyer belt stopped once tube was closed, however, the pully motor continues to rotate.




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