Problem tylannitride 2003-08-02 16:13:40: New results about bubbles

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Sat Aug 2 04:13:41 PDT 2003


I ran nitride2 recipe (standard nitride) on bare Si wafers and wafers with 200A thermnal oxide and found a lot of bubbles on both kinds of wafers. The nitride I deposited was 160A.
I did the same deposition on same kinds of wafers on 7/29 and the results for the wafers with thermal oxide was ok.




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