Problem tylannitride 2003-08-03 17:46:29: One more test

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Sun Aug 3 05:46:32 PDT 2003


Recipe nitride2 for 5min on wafers with 500A thermal oxide. 
A lot of bubbles were found under darkfield optical microscope.




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