From tberg at snf.stanford.edu Fri Feb 7 06:53:45 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Feb 7, 2003 6:53:45 AM Subject: Shutdown tylannitride 2003-02-07 06:53:44: burn box clean Message-ID: From seymour at snf.stanford.edu Fri Feb 7 07:35:52 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 7, 2003 7:35:52 AM Subject: Shutdown tylannitride 2003-02-07 06:53:44: burn box clean Message-ID: burnbox clean completed tube is up From mbadi at snf.stanford.edu Wed Feb 19 11:00:31 2003 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Feb 19, 2003 11:00:31 PM Subject: Problem tylannitride 2003-02-19 23:00:30: boat doesn't come out Message-ID: I couldn't get the boat to come out when I ran LONH378. I made sure that the tube was fully vented before starting the run. In order to debug the problem I re-ran PUMP10, let it get to step 25, and then Alarm Ack'd the system. I waited 20 mins for the tube to vent and then tried to run LONH378 again. No dice. I tried to run LSN900. No dice. I pumped it down again and left for three hours. Came back and vented the system. Tried to run LONH378. No dice. Couldn't get the boat to come out using "manual out" either. From seymour at snf.stanford.edu Thu Feb 20 07:53:37 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 20, 2003 7:53:37 AM Subject: Problem tylannitride 2003-02-19 23:00:30: boat doesn't come out Message-ID: replaced slo pump valve. Base pressure and leak rate are good.vented tube for 10 mins and loader back out ok. From tberg at snf.stanford.edu Fri Feb 21 06:26:56 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Feb 21, 2003 6:26:56 AM Subject: Shutdown tylannitride 2003-02-21 06:26:55: burn box clean Message-ID: shut down for scheduled clean From tberg at snf.stanford.edu Fri Feb 21 08:09:45 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Feb 21, 2003 8:09:45 AM Subject: Shutdown tylannitride 2003-02-21 06:26:55: burn box clean Message-ID: burn box cleaned and facilities tie in completed From rgrow at stanford.edu Fri Feb 21 12:35:49 2003 From: rgrow at stanford.edu (Randal Grow) Date: Fri, 21 Feb 2003 12:35:49 -0800 Subject: 1.2 microns of LONH378 Message-ID: <104451AD-45DC-11D7-A9AB-000393910ACA@stanford.edu> I have a small number of wafers (5-10) that I'd like to put a film of 1.2 microns of LONH378 onto sometime in the next week. Everything is booked. If you have a reservation and are planning to deposit something similar to that (and you wouldn't mind adding my wafers to your batch) or have time that you're not going to use, please let me know. Thanks, Randy