From crichter at snf.stanford.edu Mon Jul 7 06:46:18 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Jul 7, 2003 6:46:18 PM Subject: Problem tylannitride 2003-07-07 18:46:16: bumpy film quality, target thickness way off Message-ID: Deposition target way off for NEWLSN recipie (57A/min instead of 80-95A/min). Many small (5-10um) bumps on film and white hazy 'stripes' From zappe at snf.stanford.edu Mon Jul 7 10:40:28 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Jul 7, 2003 10:40:28 PM Subject: Problem tylannitride 2003-07-07 22:40:25: LONH378 is normal Message-ID: LONH378 seems to be fine. Half an hour resulted as expected in 97 nm of nitride film thickness (assumed R.I. of 2.4). Surface is smooth. Pressures were okay, too. From qwang at snf.stanford.edu Tue Jul 8 10:45:00 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Jul 8, 2003 10:45:00 AM Subject: Problem tylannitride 2003-07-08 10:45:00: small particle on the surface Message-ID: Deposition rate: 980A/30 minutes. Pressure is OK. Many small particles with size of ~1um can be found by optical in dark field. From zappe at snf.stanford.edu Wed Jul 9 02:20:05 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Jul 9, 2003 2:20:05 AM Subject: Problem tylannitride 2003-07-09 02:20:03: Latest results Message-ID: once again LONH378 seems to be normal, EXCEPT for countless small bubbles (<1 um). Bubbles seem to be formed only on top of thermal oxide film, nitride on silicon seems to be bubble free. From mdickey at snf.stanford.edu Wed Jul 9 11:23:09 2003 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Wed, 09 Jul 2003 11:23:09 -0700 Subject: LTO Quartz plate Message-ID: <3F0C5D8D.272D7714@snf.stanford.edu> This message is to let all users of the LTO/BPSG furnace that we now have quartz plate for the wafer boats and quartz top....It is located at the load station of the TYSTAR furnace. It is to be used for setting the quartz boats on when the boats are not on the cantilever. We are putting it there to avoid any accidents of the FGA cantilever coming out while the quartz boats are at the load station. Please use it accordingly and you will no longer need to use wipes. Please let me know if you have any questions or comments. Mike Dickey From beckwith at cis.stanford.edu Wed Jul 9 12:03:02 2003 From: beckwith at cis.stanford.edu (Sharleen Beckwith) Date: Wed, 9 Jul 2003 12:03:02 -0700 Subject: LTO Quartz plate In-Reply-To: <3F0C5D8D.272D7714@snf.stanford.edu> References: <3F0C5D8D.272D7714@snf.stanford.edu> Message-ID: Could a SNF staff member post a procedure near this plate explaining how to keep this plate CLEAN. Otherwise, people will be putting cassette boxes, hands with dirty gloves, and who knows what else on it. Those of who fabricate devices care about these issues. Thanks. At 11:23 AM -0700 7/9/03, Mike Dickey wrote: >This message is to let all users of the LTO/BPSG furnace that we now >have quartz >plate for the wafer boats and quartz top....It is located at the load >station of the TYSTAR furnace. It is to be used for setting the quartz >boats on when the boats are not on the cantilever. We are putting it >there to avoid any accidents of the FGA cantilever coming out while the >quartz boats are at the load station. Please use it accordingly and you >will no longer need to use wipes. Please let me know if you have any >questions or comments. > > Mike Dickey -- Bush "calls his biggest fundraisers Rangers and Pioneers. But today, we stand together with thousands in Burlington, Vermont and tens of thousands more, standing with us right now in every state in this nation. And we call ourselves, simply, Americans." Howard Dean, M. D., June 23, 2003 http://www.deanforamerica.com/ From gladys at snf.stanford.edu Tue Jul 15 18:24:34 2003 From: gladys at snf.stanford.edu (Gladys Sarmiento) Date: Tue, 15 Jul 2003 18:24:34 -0700 Subject: LONH378 recipe Message-ID: <3F14A952.6060205@snf.stanford.edu> Tylannitride users: On the LONH378 recipe, a 15 minute extended NH3 flow had been added after the deposition. We hope that this will help reduce the amount of "bubbles" in the film. Please add the extra 15 minutes to the total process time. Gladys -- Gladys Sarmiento Stanford Nanofabrication Facility 420 Via Mall, CIS 145 Stanford, CA 94305-4070 (650) 725-6199 gladys at snf.stanford.edu From sahin at snf.stanford.edu Mon Jul 21 03:36:05 2003 From: sahin at snf.stanford.edu (sahin at snf.stanford.edu) Date: Jul 21, 2003 3:36:05 PM Subject: Problem tylannitride 2003-07-21 15:36:05: Report Problem for tylannitride Message-ID: templ is showing 400 instead of 789 at step 55. the other temp values are OK. From tberg at snf.stanford.edu Tue Jul 22 06:35:09 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jul 22, 2003 6:35:09 AM Subject: Problem tylannitride 2003-07-21 15:36:05: Report Clear for tylannitride Message-ID: bad connection at TC looks fine now From gladys at snf.stanford.edu Tue Jul 29 03:31:32 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jul 29, 2003 3:31:32 PM Subject: Shutdown tylannitride 2003-07-29 15:31:30: Report Shutdown for tylannitride Message-ID: burnbox is down From seymour at snf.stanford.edu Tue Jul 29 03:55:09 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jul 29, 2003 3:55:09 PM Subject: Shutdown tylannitride 2003-07-29 15:31:30: Report Clear for tylannitride Message-ID: replaced breaker with a fuse and burnbox is up to temp From gladys at snf.stanford.edu Tue Jul 29 04:14:37 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jul 29, 2003 4:14:37 PM Subject: Shutdown tylannitride 2003-07-29 16:14:37: Report Shutdown for tylannitride Message-ID: burnbox is down From maurice at snf.stanford.edu Tue Jul 29 04:58:10 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Jul 29, 2003 4:58:10 PM Subject: Shutdown tylannitride 2003-07-29 16:14:37: Report Clear for tylannitride Message-ID: clear