From bob101 at snf.stanford.edu Sat Mar 8 08:21:35 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: Mar 8, 2003 8:21:35 AM Subject: Problem tylannitride 2003-03-08 08:21:35: Report Problem for tylannitride Message-ID: Last night the power of this bank turn off for unknown reason. Now tube seems in vaccum and pump10 can not go through 10th step. From seymour at snf.stanford.edu Sat Mar 8 01:27:13 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 8, 2003 1:27:13 PM Subject: Problem tylannitride 2003-03-08 08:21:35: Report Clear for tylannitride Message-ID: Found the tube less then 200 degrees with pump off and MFS460 in manual. Started pump and put the controller in auto. Started pump10, and checked operation, which is normal at this time. From hansen at snf.stanford.edu Mon Mar 10 08:54:05 2003 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Mar 10, 2003 8:54:05 PM Subject: Problem tylannitride 2003-03-10 20:54:02: MFS alarm; This is NOT nitride! RI=2.69 Message-ID: I ran a 20 minute dep of LONH378 and got a film with refractive index of 2.69 measured on the ellipsometer. The film also has a strange pickish color, no matter what the thickness of the nitride films underneath. This is obviously not a nitride film, and it has likely ruined my process. -Sean Hansen From gladys at snf.stanford.edu Tue Mar 11 10:07:44 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mar 11, 2003 10:07:44 AM Subject: Problem tylannitride 2003-03-11 10:07:44: Report Problem for tylannitride : No LoNH3 Message-ID: LONH3 is not available until further notice. NH3 is ok to use From tberg at snf.stanford.edu Tue Mar 11 01:24:40 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 11, 2003 1:24:40 PM Subject: Shutdown tylannitride 2003-03-11 13:24:40: Report Shutdown for tylannitride Message-ID: Changing NH3 mfc From tberg at snf.stanford.edu Tue Mar 11 01:46:28 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 11, 2003 1:46:28 PM Subject: Shutdown tylannitride 2003-03-11 13:24:40: Report Clear for tylannitride Message-ID: Replaced lonh3 MFC checked flow looks fine From gladys at snf.stanford.edu Tue Mar 11 01:54:00 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mar 11, 2003 1:54:00 PM Subject: Shutdown tylannitride 2003-03-11 13:53:59: Report Shutdown for tylannitride Message-ID: Running a testrun... From gladys at snf.stanford.edu Tue Mar 11 05:55:20 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mar 11, 2003 5:55:20 PM Subject: Shutdown tylannitride 2003-03-11 13:53:59: Report Clear for tylannitride Message-ID: testrun completed no problem on the gas flows From gladys at snf.stanford.edu Tue Mar 11 05:55:45 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mar 11, 2003 5:55:45 PM Subject: Problem tylannitride 2003-03-11 10:07:44: Report Clear for tylannitride Message-ID: testrun completed From gladys at snf.stanford.edu Tue Mar 11 05:56:23 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mar 11, 2003 5:56:23 PM Subject: Problem tylannitride 2003-03-10 20:54:02: Report Clear for tylannitride Message-ID: testrun completed; no problem on the gas flows From tberg at snf.stanford.edu Fri Mar 14 07:06:31 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 14, 2003 7:06:31 AM Subject: Shutdown tylannitride 2003-03-14 07:06:31: Report Shutdown for tylannitride Message-ID: down for burn box clean From tberg at snf.stanford.edu Fri Mar 14 08:01:10 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 14, 2003 8:01:10 AM Subject: Shutdown tylannitride 2003-03-14 07:06:31: Report Clear for tylannitride Message-ID: burn box cleaned From tberg at snf.stanford.edu Fri Mar 21 06:19:09 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 21, 2003 6:19:09 AM Subject: Shutdown tylannitride 2003-03-21 06:19:08: Report Shutdown for tylannitride Message-ID: burnbox clean From tberg at snf.stanford.edu Fri Mar 21 07:20:39 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 21, 2003 7:20:39 AM Subject: Shutdown tylannitride 2003-03-21 06:19:08: Report Clear for tylannitride Message-ID: cleaned burn box From tberg at snf.stanford.edu Fri Mar 28 06:27:07 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 28, 2003 6:27:07 AM Subject: Shutdown tylannitride 2003-03-28 06:27:06: Report Shutdown for tylannitride Message-ID: burn box clean From seymour at snf.stanford.edu Fri Mar 28 07:17:23 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 28, 2003 7:17:23 AM Subject: Shutdown tylannitride 2003-03-28 06:27:06: Report Clear for tylannitride Message-ID: burnbox clean completed From tberg at snf.stanford.edu Mon Mar 31 06:22:30 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 31, 2003 6:22:30 AM Subject: Shutdown tylannitride 2003-03-31 06:22:29: Report Shutdown for tylannitride Message-ID: Pull and clean From mdickey at snf.stanford.edu Mon Mar 31 02:04:18 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mar 31, 2003 2:04:18 PM Subject: Comment tylannitride 2003-03-31 14:04:17: Report Comment for tylannitride Message-ID: Finished with pull and clean. Leak checks were good. Needs test. From gladys at snf.stanford.edu Mon Mar 31 07:21:08 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mar 31, 2003 7:21:08 PM Subject: Shutdown tylannitride 2003-03-31 06:22:29: Report Clear for tylannitride Message-ID: testrun completed, ok to use