From kailash at snf.stanford.edu Sun Nov 2 10:50:53 2003 From: kailash at snf.stanford.edu (kailash at snf.stanford.edu) Date: Sun, 2 Nov 2003 10:50:53 -0800 Subject: Problem tylannitride 2003-11-02 10:50:52: bubbles in nitride film Message-ID: Ran Nitride2 on Wed night / Thursday morning. Found bubbles in all 3 runs. Thicknesses desired and obtained were around 200-300 A. Sorry for the delay in reporting From maurice at snf.stanford.edu Wed Nov 12 11:11:54 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 12 Nov 2003 11:11:54 -0800 Subject: Problem tylannitride 2003-11-02 10:50:52: bubbles in nitride film Message-ID: event logged From hanjun at snf.stanford.edu Wed Nov 12 17:11:57 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Wed, 12 Nov 2003 17:11:57 -0800 Subject: Problem tylannitride 2003-11-12 17:11:57: TCU fault Message-ID: The tube was found idle at atmospheric pressure. I guess it has been so for overnight, because the last usage seen from Coral is midnight. When I tried to run "pump10" to pump down the tube, "TCU fault" message was displayed. Thanks. From hanjun at snf.stanford.edu Wed Nov 12 18:19:27 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Wed, 12 Nov 2003 18:19:27 -0800 Subject: Problem tylannitride 2003-11-12 18:19:27: tube not open Message-ID: At the second try, the tube successfully ran "pump10" recipe. However, when tried with "lonh378", the tube didn't open at step 5 but got stuck. Reloaded "pump10" and ran. Thanks. From mdickey at snf.stanford.edu Thu Nov 13 09:08:05 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 13 Nov 2003 09:08:05 -0800 Subject: Shutdown tylannitride 2003-11-13 09:08:05: Report Shutdown for tylannitride Message-ID: Gate valve will not open From tberg at snf.stanford.edu Thu Nov 13 15:13:51 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Nov 2003 15:13:51 -0800 Subject: Problem tylannitride 2003-11-12 17:11:57: TCU fault Message-ID: Chcked system no error From tberg at snf.stanford.edu Thu Nov 13 15:14:22 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Nov 2003 15:14:22 -0800 Subject: Problem tylannitride 2003-11-12 18:19:27: tube not open Message-ID: Replaced soft pump valve and chceked out From tberg at snf.stanford.edu Thu Nov 13 15:15:29 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Nov 2003 15:15:29 -0800 Subject: Shutdown tylannitride 2003-11-13 09:08:05: Report Shutdown for tylannitride Message-ID: Found bad connector, replaced readout board, checked all gas flows and leak rate ok From tberg at snf.stanford.edu Thu Nov 13 15:16:11 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Nov 2003 15:16:11 -0800 Subject: Comment tylannitride 2003-11-13 15:16:11: Report Comment for tylannitride Message-ID: Gate valve LED on MFS 460 not functional but valve wors fine. From tberg at snf.stanford.edu Fri Nov 14 07:01:38 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Nov 2003 07:01:38 -0800 Subject: Shutdown tylannitride 2003-11-14 07:01:37: replacing gate valve LED Message-ID: From tberg at snf.stanford.edu Fri Nov 14 09:14:22 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Nov 2003 09:14:22 -0800 Subject: Comment tylannitride 2003-11-13 15:16:11: Report Comment for tylannitride Message-ID: Replaced LED From tberg at snf.stanford.edu Fri Nov 14 09:14:54 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 14 Nov 2003 09:14:54 -0800 Subject: Shutdown tylannitride 2003-11-14 07:01:37: replacing gate valve LED Message-ID: Replaced Gate valve LED works ok Now From bashar at snf.stanford.edu Sat Nov 15 16:00:18 2003 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Sat, 15 Nov 2003 16:00:18 -0800 Subject: Problem tylannitride 2003-11-15 16:00:17: Pressure Too Hi for Process Message-ID: Pump10 or Nitride2 Recipes will not Run because pressure does not drop below 2000. From mdickey at snf.stanford.edu Mon Nov 17 07:26:56 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Nov 2003 07:26:56 -0800 Subject: Problem tylannitride 2003-11-15 16:00:17: Pressure Too Hi for Process Message-ID: Pumped the tube down and did a leak check. Did not see any problems From maurice at snf.stanford.edu Mon Nov 17 15:11:16 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Nov 2003 15:11:16 -0800 Subject: Shutdown tylannitride 2003-11-17 15:11:15: temp high during unload Message-ID: tube unloaded before cooling . unloaded at 745 degrees From seymour at snf.stanford.edu Mon Nov 17 15:48:26 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Nov 2003 15:48:26 -0800 Subject: Shutdown tylannitride 2003-11-17 15:11:15: temp high during unload Message-ID: checked T/C connections and temp controller started reading correctly. Reset the TCU controller, and monitored the temperature and control. It is working properly at this time. From seymour at snf.stanford.edu Mon Nov 17 15:52:38 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Nov 2003 15:52:38 -0800 Subject: Problem tylannitride 2003-11-17 15:52:38: temperature control on load zone. Message-ID: The load zone had a control problem and indicated 400 not the actual 750 degrees. The controller is working correctly at this time, but use caution if you run this tube while the stability is being observed. From seymour at snf.stanford.edu Tue Nov 25 09:58:03 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Nov 2003 09:58:03 -0800 Subject: Problem tylannitride 2003-11-17 15:52:38: temperature control on load zone. Message-ID: The temp has been monitored and has not failed since the first problem. Putting the tube up