Problem tylannitride 2003-11-02 10:50:52: bubbles in nitride film

kailash at kailash at
Sun Nov 2 10:50:53 PST 2003

Ran Nitride2 on Wed night / Thursday morning. Found bubbles in all 3 runs. Thicknesses desired and obtained were around 200-300 A. Sorry for the delay in reporting

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