From ychliu at snf.stanford.edu Fri Oct 3 12:03:47 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Oct 3, 2003 12:03:47 AM Subject: Shutdown tylannitride 2003-10-03 00:03:47: burnbox alarm Message-ID: From tberg at snf.stanford.edu Fri Oct 3 08:12:04 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 3, 2003 8:12:04 AM Subject: Shutdown tylannitride 2003-10-03 00:03:47: Report Clear for tylannitride Message-ID: Burn box cleaned . temp switch replaced-ok now From maurice at snf.stanford.edu Tue Oct 7 10:34:57 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 7, 2003 10:34:57 AM Subject: Problem tylannitride 2003-08-02 16:13:40: Report Clear for tylannitride Message-ID: message logged. investigation ongoing. From maurice at snf.stanford.edu Tue Oct 7 10:35:18 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 7, 2003 10:35:18 AM Subject: Problem tylannitride 2003-08-03 17:46:29: Report Clear for tylannitride Message-ID: message logged. investigation ongoing. From maurice at snf.stanford.edu Tue Oct 7 10:35:37 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 7, 2003 10:35:37 AM Subject: Problem tylannitride 2003-07-09 02:20:03: Report Clear for tylannitride Message-ID: message logged. investigation ongoing. From tberg at snf.stanford.edu Thu Oct 9 02:56:19 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 9, 2003 2:56:19 PM Subject: Shutdown tylannitride 2003-10-09 14:56:19: Report Shutdown for tylannitride Message-ID: Mechanical Pump died. we will replace it in the morning From beckwith at snf.stanford.edu Thu Oct 9 06:12:30 2003 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Oct 9, 2003 6:12:30 PM Subject: Problem tylannitride 2003-10-09 18:12:30: Report Problem for tylannitride Message-ID: There was a note on the tube when I returned stating that there was a MFS alarm at step 105 (after the depositon). I think the failure must have happened during the run because I have ~1800 A of nitride on my wafers when there should be 5000A. Eric said if there was a gas flow problem the program would jump to the next step. I suspect this happened early in the dep cycle. Also there was a substantial amount of "dust" all over the wafers which I rinsed off in the dump rinser at wbnonmetal. I think there is a bigger problem than just the pump. In the future, could the person leaving the note please sign it so I know who wrote it. Thanks. From tberg at snf.stanford.edu Fri Oct 10 08:15:05 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 10, 2003 8:15:05 AM Subject: Shutdown tylannitride 2003-10-09 14:56:19: Report Clear for tylannitride Message-ID: Replaced mechanical pump did leak check. needs test. From maurice at snf.stanford.edu Fri Oct 10 03:06:50 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 10, 2003 3:06:50 PM Subject: Problem tylannitride 2003-10-09 18:12:30: Report Clear for tylannitride Message-ID: Pump replaced. Nitride2 test run. Few "bumps". Thickness good. From maurice at snf.stanford.edu Fri Oct 10 03:14:20 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 10, 2003 3:14:20 PM Subject: Problem tylannitride 2003-07-08 10:45:00: Report Clear for tylannitride Message-ID: Small particles don't seem to be a problem on Nitride2 program(at the moment). Four test have been run. From mislam at snf.stanford.edu Thu Oct 16 10:22:35 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Oct 16, 2003 10:22:35 AM Subject: Problem tylannitride 2003-10-16 10:22:35: wafers out without dep. - vacuum leak? Message-ID: While running NEWLSN recipe wafers came out too soon. Could be that did not pass leak test. From tberg at snf.stanford.edu Thu Oct 16 01:35:39 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 16, 2003 1:35:39 PM Subject: Shutdown tylannitride 2003-10-16 13:35:39: Report Shutdown for tylannitride Message-ID: System will not pump down From tberg at snf.stanford.edu Thu Oct 16 02:57:21 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Oct 16, 2003 2:57:21 PM Subject: Comment tylannitride 2003-10-16 14:57:21: Report Comment for tylannitride Message-ID: Looks like leak in loader. we will rebuild tomorrow From maurice at snf.stanford.edu Fri Oct 17 04:54:21 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 17, 2003 4:54:21 PM Subject: Shutdown tylannitride 2003-10-16 13:35:39: Report Clear for tylannitride Message-ID: tube replaced. test okay. From maurice at snf.stanford.edu Fri Oct 17 04:54:51 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Oct 17, 2003 4:54:51 PM Subject: Problem tylannitride 2003-10-16 10:22:35: Report Clear for tylannitride Message-ID: tube replaced From ericp at snf.stanford.edu Sun Oct 19 06:50:43 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Oct 19, 2003 6:50:43 PM Subject: Problem tylannitride 2003-10-19 18:50:41: Problem tylannitride- base/leak pressure Message-ID: Base and leak pressures getting a little high. Yahong's run before mine was on the high side, and mine came out at ~ 30 and 55 mT . Trip point is 60mT for leak. -Eric From xiangli at snf.stanford.edu Mon Oct 20 12:56:36 2003 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Oct 20, 2003 12:56:36 AM Subject: Problem tylannitride 2003-10-20 00:56:33: Report Problem for tylannitride Message-ID: Leakage check fail From ychliu at snf.stanford.edu Wed Oct 22 05:28:18 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Oct 22, 2003 5:28:18 PM Subject: Problem tylannitride 2003-10-22 17:28:17: particle problem Message-ID: I ran nitride2 for 40min last Wednesday and the same recipe for 30min today with B-prime Si wafers. Both runs gave a lot of particles. From ychliu at snf.stanford.edu Wed Oct 22 09:51:53 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Oct 22, 2003 9:51:53 PM Subject: Problem tylannitride 2003-10-22 21:51:52: Good deposition Message-ID: I did one more test run. Recipe nitride2 for 20min. The result was pretty good. Wafers were clean. From maurice at snf.stanford.edu Wed Oct 29 09:52:11 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Oct 2003 09:52:11 -0800 Subject: Problem tylannitride 2003-10-22 21:51:52: Report Clear for tylannitride Message-ID: event logged From maurice at snf.stanford.edu Wed Oct 29 09:52:41 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Oct 2003 09:52:41 -0800 Subject: Problem tylannitride 2003-10-22 17:28:17: Report Clear for tylannitride Message-ID: event logged From maurice at snf.stanford.edu Wed Oct 29 09:53:30 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Oct 2003 09:53:30 -0800 Subject: Problem tylannitride 2003-10-20 00:56:33: Report Clear for tylannitride Message-ID: leak check problem resolved. sheath replaced From maurice at snf.stanford.edu Wed Oct 29 09:54:13 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Oct 2003 09:54:13 -0800 Subject: Problem tylannitride 2003-10-19 18:50:41: Report Clear for tylannitride Message-ID: event logged From maurice at snf.stanford.edu Wed Oct 29 10:04:46 2003 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Oct 2003 10:04:46 -0800 Subject: Problem tylannitride 2003-07-07 18:46:16: Report Clear for tylannitride Message-ID: The newlsn program has been giving good results lately. Both Claudia and Ychliu have been happy with the lasts runs.