Problem tylannitride 2003-10-16 10:22:35: wafers out without dep. - vacuum leak?
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Thu Oct 16 10:22:35 PDT 2003
While running NEWLSN recipe wafers came out too soon.
Could be that did not pass leak test.
More information about the tylannitride-pcs
mailing list