Problem tylannitride 2003-10-22 17:28:17: particle problem

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Wed Oct 22 05:28:18 PDT 2003


I ran nitride2 for 40min last Wednesday and the same recipe for 30min today with B-prime Si wafers. Both runs gave a lot of particles.




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