From tberg at snf.stanford.edu Thu Apr 1 10:51:01 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 1 Apr 2004 10:51:01 -0800 Subject: Comment tylannitride 2004-04-01 10:51:00: Installed readout in softpump Message-ID: Installed readout in softpump line for system From tberg at snf.stanford.edu Thu Apr 8 11:04:30 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 8 Apr 2004 11:04:30 -0700 Subject: Comment tylannitride 2004-04-01 10:51:00: Installed readout in softpump Message-ID: noted From tberg at snf.stanford.edu Thu Apr 8 11:05:09 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 8 Apr 2004 11:05:09 -0700 Subject: Comment tylannitride 2004-04-08 11:05:08: Installed LoNH3 mfc Message-ID: Installed lonh3 mfc From sahin at snf.stanford.edu Fri Apr 9 01:40:38 2004 From: sahin at snf.stanford.edu (sahin at snf.stanford.edu) Date: Fri, 9 Apr 2004 01:40:38 -0700 Subject: Problem tylannitride 2004-04-09 01:40:37: MFS alarm Message-ID: From sahin at snf.stanford.edu Fri Apr 9 03:05:32 2004 From: sahin at snf.stanford.edu (sahin at snf.stanford.edu) Date: Fri, 9 Apr 2004 03:05:32 -0700 Subject: Problem tylannitride 2004-04-09 03:05:31: LSN bad film quality Message-ID: nitride layer do not reflect at all. I observed MFS alarm during deposition. From tberg at snf.stanford.edu Mon Apr 12 12:10:51 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Apr 2004 12:10:51 -0700 Subject: Comment tylannitride 2004-04-12 12:10:49: Replaced LoNH3 MFC Message-ID: Replaced LoNH3 mfc and checked flowvs.vs pressure:10 cc-30 mT,20cc-42mT,30cc-49mT,40-58mT,50cc-67mT From tberg at snf.stanford.edu Mon Apr 12 12:11:27 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Apr 2004 12:11:27 -0700 Subject: Comment tylannitride 2004-04-08 11:05:08: Installed LoNH3 mfc Message-ID: noted From tberg at snf.stanford.edu Mon Apr 12 12:11:54 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Apr 2004 12:11:54 -0700 Subject: Problem tylannitride 2004-04-09 01:40:37: MFS alarm Message-ID: Replaced MFC with old one From tberg at snf.stanford.edu Mon Apr 12 12:15:37 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Apr 2004 12:15:37 -0700 Subject: Comment tylannitride 2004-04-12 12:15:33: new MFC is installed today Message-ID: Clarification. The MFC that was installed this morning was a new one. From mdickey at snf.stanford.edu Tue Apr 20 07:18:56 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 20 Apr 2004 07:18:56 -0700 Subject: Comment tylannitride 2004-04-20 07:18:55: Slow pump Message-ID: Replaced clogged slow pump From xiajing at snf.stanford.edu Tue Apr 27 22:41:01 2004 From: xiajing at snf.stanford.edu (xiajing at snf.stanford.edu) Date: Tue, 27 Apr 2004 22:41:01 -0700 Subject: Problem tylannitride 2004-04-27 22:41:00: it ends pumping too lowly Message-ID: From xiajing at snf.stanford.edu Tue Apr 27 22:48:02 2004 From: xiajing at snf.stanford.edu (xiajing at snf.stanford.edu) Date: Tue, 27 Apr 2004 22:48:02 -0700 Subject: Comment tylannitride 2004-04-27 22:48:01: waited for 1 and half hours after it ended pumping ,but still can't open it.,have to give up. Message-ID: From tberg at snf.stanford.edu Wed Apr 28 06:23:46 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Apr 2004 06:23:46 -0700 Subject: Comment tylannitride 2004-04-12 12:10:49: Replaced LoNH3 MFC Message-ID: noted From tberg at snf.stanford.edu Wed Apr 28 06:23:58 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Apr 2004 06:23:58 -0700 Subject: Comment tylannitride 2004-04-12 12:15:33: new MFC is installed today Message-ID: noted From mdickey at snf.stanford.edu Wed Apr 28 07:12:58 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 28 Apr 2004 07:12:58 -0700 Subject: Comment tylannitride 2004-04-27 22:48:01: waited for 1 and half hours after it ended pumping ,but still can't open it.,have to give up. Message-ID: Slow pump has been changed From mdickey at snf.stanford.edu Wed Apr 28 07:13:13 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 28 Apr 2004 07:13:13 -0700 Subject: Problem tylannitride 2004-04-27 22:41:00: it ends pumping too lowly Message-ID: Slow pump needed changing From mdickey at snf.stanford.edu Wed Apr 28 07:13:25 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 28 Apr 2004 07:13:25 -0700 Subject: Comment tylannitride 2004-04-20 07:18:55: Slow pump Message-ID: SLow pump replaced From maurice at snf.stanford.edu Wed Apr 28 11:18:35 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Apr 2004 11:18:35 -0700 Subject: Problem tylannitride 2004-04-09 03:05:31: LSN bad film quality Message-ID: lo NH3 failure, MFC replaced logged From vossough at snf.stanford.edu Thu Apr 29 21:09:23 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Thu, 29 Apr 2004 21:09:23 -0700 Subject: Shutdown tylannitride 2004-04-29 21:09:22: tube does not vent Message-ID: Hit "Alarm ack" twice to vent. After 35-40 min, the pressure was at 500torr. Does not vent and cannot open tube. From seymour at snf.stanford.edu Fri Apr 30 09:07:33 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 30 Apr 2004 09:07:33 -0700 Subject: Shutdown tylannitride 2004-04-29 21:09:22: tube does not vent Message-ID: Mike replaced the slo pump valve and wraped the valve with heater tape. From maurice at snf.stanford.edu Fri Apr 30 14:15:15 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Apr 2004 14:15:15 -0700 Subject: Comment tylannitride 2004-04-30 14:15:15: LONH378 test Message-ID: Test after new slow pump valve installed and wrapped in heat tape. Uniformity and thickness good. First test wafer looked bad: lots of particles. Second wafer was better; some partices. Third wafer looked good; ver few particles. There were two dummy wafers in front of the test wafers and one behind.