Comment tylannitride 2004-04-30 14:15:15: LONH378 test

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Apr 30 14:15:15 PDT 2004


Test after new slow pump valve installed and wrapped in heat tape.
Uniformity and thickness good.
First test wafer looked bad: lots of particles.  
Second wafer was better; some partices.
Third wafer looked good; ver few particles.
There were two dummy wafers in front of the test wafers and one behind.




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