From tberg at snf.stanford.edu Mon Aug 2 16:20:12 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 Aug 2004 16:20:12 -0700 Subject: Comment tylannitride SNF 2004-08-02 16:20:10: TUbe replaced Message-ID: Tube replaced and pumping down will coat in the morning From tberg at snf.stanford.edu Tue Aug 3 06:35:57 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Aug 2004 06:35:57 -0700 Subject: Comment tylannitride SNF 2004-08-03 06:35:57: tube is in coat program Message-ID: Tube is in coat program will need a test after coat From maurice at snf.stanford.edu Tue Aug 3 11:40:31 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Aug 2004 11:40:31 -0700 Subject: Comment tylannitride SNF 2004-08-02 16:20:10: TUbe replaced Message-ID: logged From maurice at snf.stanford.edu Tue Aug 3 11:40:52 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Aug 2004 11:40:52 -0700 Subject: Comment tylannitride SNF 2004-07-30 13:33:59: Tube has a large leak Message-ID: logged From maurice at snf.stanford.edu Tue Aug 3 11:47:48 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Aug 2004 11:47:48 -0700 Subject: Shutdown tylannitride SNF 2004-08-03 11:47:48: Failed leak check during test Message-ID: Failed gross leak check during test. Gate valve never opens (steps 15 -30). Currently: Tube holding in step 20 of Nitr2coa program (00:30:00 ) with test wafers loaded. If it works , please run Nitr2coa program for 00:30:00 From latta at snf.stanford.edu Tue Aug 3 20:38:20 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Aug 2004 20:38:20 -0700 Subject: Shutdown tylannitride SNF 2004-08-03 11:47:48: Failed leak check during test Message-ID: Test run ok From latta at snf.stanford.edu Tue Aug 3 20:38:39 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Aug 2004 20:38:39 -0700 Subject: Shutdown tylannitride SNF 2004-07-30 08:45:21: Bad Pump Message-ID: pump and tube replaced From latta at snf.stanford.edu Tue Aug 3 20:38:51 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Aug 2004 20:38:51 -0700 Subject: Comment tylannitride SNF 2004-08-03 06:35:57: tube is in coat program Message-ID: coat completed From latta at snf.stanford.edu Tue Aug 3 20:39:33 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Aug 2004 20:39:33 -0700 Subject: Problem tylannitride SNF 2004-08-03 20:39:32: did not vent Message-ID: Ceasar bailed me out. From latta at snf.stanford.edu Tue Aug 3 20:40:41 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Aug 2004 20:40:41 -0700 Subject: Shutdown tylannitride SNF 2004-08-03 20:40:41: did not pass leak ck in pump10 prog Message-ID: Grrrrr.... From mdickey at snf.stanford.edu Wed Aug 4 07:51:10 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 4 Aug 2004 07:51:10 -0700 Subject: Shutdown tylannitride SNF 2004-08-03 20:40:41: did not pass leak ck in pump10 prog Message-ID: System was not running pump program. After purging the tube for a while and checking the boat in and out the system appears to be running ok From mdickey at snf.stanford.edu Wed Aug 4 07:51:50 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 4 Aug 2004 07:51:50 -0700 Subject: Problem tylannitride SNF 2004-08-03 20:39:32: did not vent Message-ID: logged From mdickey at snf.stanford.edu Wed Aug 4 14:01:36 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 4 Aug 2004 14:01:36 -0700 Subject: Shutdown tylannitride SNF 2004-08-04 14:01:35: Slow pump check Message-ID: Down to inspect slow pump From mdickey at snf.stanford.edu Wed Aug 4 14:50:24 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 4 Aug 2004 14:50:24 -0700 Subject: Shutdown tylannitride SNF 2004-08-04 14:01:35: Slow pump check Message-ID: cleaned clogged slow pump, back in pump program From maurice at snf.stanford.edu Wed Aug 4 17:21:36 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Aug 2004 17:21:36 -0700 Subject: Problem tylannitride SNF 2004-08-04 17:21:35: Not venting Message-ID: From mdickey at snf.stanford.edu Thu Aug 5 07:09:36 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Aug 2004 07:09:36 -0700 Subject: Shutdown tylannitride SNF 2004-08-05 07:09:35: Venting problem Message-ID: Looking into venting problem From mdickey at snf.stanford.edu Thu Aug 5 08:11:41 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Aug 2004 08:11:41 -0700 Subject: Shutdown tylannitride SNF 2004-08-05 07:09:35: Venting problem Message-ID: Reseated slow pump valve. Venting properly now From mdickey at snf.stanford.edu Thu Aug 5 08:11:59 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Aug 2004 08:11:59 -0700 Subject: Problem tylannitride SNF 2004-08-04 17:21:35: Not venting Message-ID: Reseated slow pump valve. Venting properly. From maurice at snf.stanford.edu Mon Aug 30 17:07:11 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 30 Aug 2004 17:07:11 -0700 Subject: Shutdown tylannitride SNF 2004-08-30 17:07:09: Glove touched hot cantilever Message-ID: Glove touched hot cantilever. From mdickey at snf.stanford.edu Tue Aug 31 07:16:53 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 31 Aug 2004 07:16:53 -0700 Subject: Shutdown tylannitride SNF 2004-08-30 17:07:09: Glove touched hot cantilever Message-ID: Glove residue has been cleaned up...ready for use From arvind at snf.stanford.edu Tue Aug 31 19:03:48 2004 From: arvind at snf.stanford.edu (arvind at snf.stanford.edu) Date: Tue, 31 Aug 2004 19:03:48 -0700 Subject: Problem tylannitride SNF 2004-08-31 19:03:47: No deposition possible Message-ID: I ran LONH378. At step 35(Pumpdown & Gross Leak Check) it checks the process pressure. Since it was above the threshold of 500, it aborted and went to step 115(Backfill and abort step). No deposition was possible 'cos the leak test failed. arvind