Shutdown tylannitride SNF 2004-08-03 11:47:48: Failed leak check during test

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Aug 3 11:47:48 PDT 2004


Failed gross leak check during test.
Gate valve never opens (steps 15 -30).  
Currently: Tube holding in step 20 of Nitr2coa program (00:30:00 ) with test wafers loaded.  If it works , please run Nitr2coa program for 00:30:00 




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