Problem tylannitride SNF 2004-08-31 19:03:47: No deposition possible

[arvind at snf.stanford.edu]

I ran LONH378. At step 35(Pumpdown & Gross Leak Check) it
checks the process pressure. Since it was above the threshold 
of 500, it aborted and went to step 115(Backfill and abort 
step).
No deposition was possible 'cos the leak test failed.
arvind