Problem tylannitride SNF 2004-08-31 19:03:47: No deposition possible

arvind at snf.stanford.edu arvind at snf.stanford.edu
Tue Aug 31 19:03:48 PDT 2004


I ran LONH378. At step 35(Pumpdown & Gross Leak Check) it
checks the process pressure. Since it was above the threshold 
of 500, it aborted and went to step 115(Backfill and abort 
step).
No deposition was possible 'cos the leak test failed.
arvind




More information about the tylannitride-pcs mailing list