From crichter at snf.stanford.edu Tue Feb 3 18:06:16 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 3 Feb 2004 18:06:16 -0800 Subject: Problem tylannitride 2004-02-03 18:06:15: particles still present Message-ID: I did a run using the NEWLSN recipe and still found particles on the wafer surface. However, the amount of particles seen this time was not as severe as last week. From maurice at snf.stanford.edu Thu Feb 5 13:59:39 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Feb 2004 13:59:39 -0800 Subject: Shutdown tylannitride 2004-02-05 13:59:38: failed leakcheck 2x Message-ID: From maurice at snf.stanford.edu Thu Feb 5 15:00:03 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Feb 2004 15:00:03 -0800 Subject: Shutdown tylannitride 2004-02-05 13:59:38: failed leakcheck 2x Message-ID: manually passed leakcheck. checking with NEWLSN From maurice at snf.stanford.edu Thu Feb 5 15:50:10 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Feb 2004 15:50:10 -0800 Subject: Comment tylannitride 2004-02-05 15:50:09: Passed leakcheck Message-ID: Program NEWLSN passed leakcheck. It had failed twice earlier today. From jenwang at snf.stanford.edu Mon Feb 9 21:54:44 2004 From: jenwang at snf.stanford.edu (jenwang at snf.stanford.edu) Date: Mon, 9 Feb 2004 21:54:44 -0800 Subject: Problem tylannitride 2004-02-09 21:54:44: Could not load the pump program Message-ID: The process ended at step 10. The pump is not working. 7 trials were made but all failed. From jenwang at snf.stanford.edu Mon Feb 9 21:58:08 2004 From: jenwang at snf.stanford.edu (jenwang at snf.stanford.edu) Date: Mon, 9 Feb 2004 21:58:08 -0800 Subject: Shutdown tylannitride 2004-02-09 21:58:07: Could not load the pump prgram Message-ID: The problem has been reported as a problem before. In addition, the door is locked so the tube could not be pulled out. From mdickey at snf.stanford.edu Tue Feb 10 09:02:39 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 10 Feb 2004 09:02:39 -0800 Subject: Shutdown tylannitride 2004-02-09 21:58:07: Could not load the pump prgram Message-ID: Unclogged slop pump exhaust line. Ready for use From mdickey at snf.stanford.edu Tue Feb 10 09:03:06 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 10 Feb 2004 09:03:06 -0800 Subject: Problem tylannitride 2004-02-09 21:54:44: Could not load the pump program Message-ID: Unclogged slow pump exhaust line. Ready for use From mdickey at snf.stanford.edu Tue Feb 10 09:03:24 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 10 Feb 2004 09:03:24 -0800 Subject: Comment tylannitride 2004-02-05 15:50:09: Passed leakcheck Message-ID: Leak check is now good From maurice at snf.stanford.edu Thu Feb 12 16:51:41 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Feb 2004 16:51:41 -0800 Subject: Shutdown tylannitride 2004-02-12 16:51:40: Dep rate high Message-ID: Dep of LONH378 twice the expected dep Uniformity bad From maurice at snf.stanford.edu Fri Feb 13 14:21:21 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Feb 2004 14:21:21 -0800 Subject: Shutdown tylannitride 2004-02-12 16:51:40: Dep rate high Message-ID: A test run verified that the dep rate is higher for the LONH378 program. It was about 35 A/min in Nov and it is 53A/min now. There were a few runs that had 41A/min in between. It has creeped up. The test run did not show the same 1000A difference in thickness across 6 wafers. Only 120A across 5 wafers. Not great. Green light for the weekend. Use at your own risk. From maurice at snf.stanford.edu Fri Feb 13 14:28:45 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Feb 2004 14:28:45 -0800 Subject: Problem tylannitride 2004-02-13 14:28:44: Hi dep rate LONH378 Message-ID: The tube is up for the weekend. Possible uniformity problem. Use at your own risk. Several users are growing masking layers and are not concerned with uniformity From hanjun at snf.stanford.edu Sun Feb 15 00:01:19 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Sun, 15 Feb 2004 00:01:19 -0800 Subject: Problem tylannitride 2004-02-15 00:01:18: Run ended / MFS alarm ON Message-ID: My run with "NITRIDE2" for 3 hours was ended without finishing deposition. The resulting wafers show very non-uniform film thickness even between the neighboring ones. Afrerwards, loaded "PUMP10" and ran, but "MFS alarm" kept turned on, along with "Function 7" display. I can't have it run, andd now, the tube is not under vacuum. The time when the fault was observed was 11:30 pm on Saturday, 2/14. From bchui at snf.stanford.edu Sun Feb 15 21:20:22 2004 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 15 Feb 2004 21:20:22 -0800 Subject: Shutdown tylannitride 2004-02-15 21:20:22: continuous MFS alarm Message-ID: To reflect the severity of the problem described in Hanjun's report, I decided to red-light this piece of equipment. PUMP10 doesn't work, so tube is at atmosphere. From tberg at snf.stanford.edu Tue Feb 17 08:19:20 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Feb 2004 08:19:20 -0800 Subject: Problem tylannitride 2004-02-15 00:01:18: Run ended / MFS alarm ON Message-ID: Pump was off. replaced filter and changed oil From tberg at snf.stanford.edu Tue Feb 17 08:20:33 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Feb 2004 08:20:33 -0800 Subject: Shutdown tylannitride 2004-02-15 21:20:22: continuous MFS alarm Message-ID: Pump was off replaced oil and filtration unit. running pump 10 now base is 25 microns, leak is 10 microns per minute From tberg at snf.stanford.edu Tue Feb 17 11:17:25 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Feb 2004 11:17:25 -0800 Subject: Shutdown tylannitride 2004-02-17 11:17:24: Shutdown to test mfcs and pump Message-ID: From tberg at snf.stanford.edu Tue Feb 17 14:33:35 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Feb 2004 14:33:35 -0800 Subject: Comment tylannitride 2004-02-17 14:33:34: _Pump changed Message-ID: The pump has been changed the system needs a test. From maurice at snf.stanford.edu Tue Feb 17 18:17:38 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Feb 2004 18:17:38 -0800 Subject: Comment tylannitride 2004-02-17 14:33:34: _Pump changed Message-ID: test complete. LOH378 program dep rate back to .33 uniformity ok very very few particles From maurice at snf.stanford.edu Tue Feb 17 18:17:54 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Feb 2004 18:17:54 -0800 Subject: Shutdown tylannitride 2004-02-17 11:17:24: Shutdown to test mfcs and pump Message-ID: logged From maurice at snf.stanford.edu Tue Feb 17 18:18:23 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Feb 2004 18:18:23 -0800 Subject: Problem tylannitride 2004-02-13 14:28:44: Hi dep rate LONH378 Message-ID: resolved with pump change From maurice at snf.stanford.edu Thu Feb 19 16:28:47 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 19 Feb 2004 16:28:47 -0800 Subject: Problem tylannitride 2004-02-19 16:28:34: NEWLSN still has particles Message-ID: NEWLSN still has particles. Claudia's deposition. From maurice at snf.stanford.edu Thu Feb 19 16:29:07 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 19 Feb 2004 16:29:07 -0800 Subject: Problem tylannitride 2004-02-03 18:06:15: particles still present Message-ID: logged From maurice at snf.stanford.edu Thu Feb 26 11:19:06 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 26 Feb 2004 11:19:06 -0800 Subject: Shutdown tylannitride 2004-02-26 11:19:05: NH3 bottle change Message-ID: From tberg at snf.stanford.edu Fri Feb 27 11:15:50 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Feb 2004 11:15:50 -0800 Subject: Shutdown tylannitride 2004-02-26 11:19:05: NH3 bottle change Message-ID: Cylinder changed From maurice at snf.stanford.edu Fri Feb 27 12:06:37 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 27 Feb 2004 12:06:37 -0800 Subject: Shutdown tylannitride 2004-02-27 12:06:36: testing after NH3 bottle change Message-ID: From maurice at snf.stanford.edu Fri Feb 27 14:10:26 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 27 Feb 2004 14:10:26 -0800 Subject: Shutdown tylannitride 2004-02-27 12:06:36: testing after NH3 bottle change Message-ID: uniformityok. still some particels. Yellow. From jenwang at snf.stanford.edu Sun Feb 29 11:19:45 2004 From: jenwang at snf.stanford.edu (jenwang at snf.stanford.edu) Date: Sun, 29 Feb 2004 11:19:45 -0800 Subject: Shutdown tylannitride 2004-02-29 11:19:44: Could not pull the tube out Message-ID: Could not pull the tube out manually after venting for 30 min.