From tberg at snf.stanford.edu Mon Jan 5 13:02:19 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Jan 2004 13:02:19 -0800 Subject: Problem tylannitride 2004-01-05 13:02:18: needs test Message-ID: Gases are back on, leak checked and gases flowed. needs test after shutdown From maurice at snf.stanford.edu Tue Jan 6 13:29:14 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Jan 2004 13:29:14 -0800 Subject: Problem tylannitride 2004-01-05 13:02:18: needs test Message-ID: Test good. Dep rate, uniformity and visual particle count all look good.. From rcrane at snf.stanford.edu Thu Jan 8 20:42:02 2004 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Thu, 8 Jan 2004 20:42:02 -0800 Subject: Shutdown tylannitride 2004-01-08 20:42:00: Vacuum exhaust line leak Message-ID: Vacuum exhaust line leak is causing D32 and the MDA to show Cl2 in the room air. From seymour at snf.stanford.edu Fri Jan 9 10:20:38 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Jan 2004 10:20:38 -0800 Subject: Shutdown tylannitride 2004-01-08 20:42:00: Vacuum exhaust line leak Message-ID: The leak was identified and was not in the nitride exhaust line. The tube was tested and no exhaust leak alarms were triggeredduring the test. The tube is up for use From crichter at snf.stanford.edu Tue Jan 20 19:01:13 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 20 Jan 2004 19:01:13 -0800 Subject: Comment tylannitride 2004-01-20 19:01:13: particle density higher on one side of all wafers Message-ID: I did a NEWLSN run for 15 minutes. Two bare silicon, and 12 thermally grown oxide wafers were in this run. All wafers were positioned with the primary flat facing upward. After the run, the wafers were inspected under the dark field. All wafers showed a higher density of particles (bubbles?) near the flat and fewer particles at the opposite end......odd. From crozier at snf.stanford.edu Fri Jan 23 14:58:23 2004 From: crozier at snf.stanford.edu (crozier at snf.stanford.edu) Date: Fri, 23 Jan 2004 14:58:23 -0800 Subject: Problem tylannitride 2004-01-23 14:58:23: bubbles Message-ID: Many "bubbles" in film deposited on 1/21/04 evening From maurice at snf.stanford.edu Mon Jan 26 10:55:29 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Jan 2004 10:55:29 -0800 Subject: Shutdown tylannitride 2004-01-26 10:55:28: pull and clean Message-ID: From maurice at snf.stanford.edu Tue Jan 27 16:50:37 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Jan 2004 16:50:37 -0800 Subject: Shutdown tylannitride 2004-01-27 16:50:36: failed leakcheck during coat Message-ID: failed leak check during coat. twice. tube is in pump10 base pressure was 29.7 From maurice at snf.stanford.edu Wed Jan 28 14:15:25 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jan 2004 14:15:25 -0800 Subject: Shutdown tylannitride 2004-01-27 16:50:36: failed leakcheck during coat Message-ID: door adjusted From maurice at snf.stanford.edu Wed Jan 28 14:45:11 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jan 2004 14:45:11 -0800 Subject: Shutdown tylannitride 2004-01-26 10:55:28: pull and clean Message-ID: pulled, cleaned, coated, tested. uniformity is good. There are still particles. But the number is gratly reduced. From maurice at snf.stanford.edu Wed Jan 28 14:48:43 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jan 2004 14:48:43 -0800 Subject: Problem tylannitride 2004-01-23 14:58:23: bubbles Message-ID: there are still particles, but the number is greatly reduced From maurice at snf.stanford.edu Wed Jan 28 14:49:55 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jan 2004 14:49:55 -0800 Subject: Comment tylannitride 2004-01-20 19:01:13: particle density higher on one side of all wafers Message-ID: Number of particles greatly reduced after pu;; and clean From maurice at snf.stanford.edu Wed Jan 28 14:50:30 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jan 2004 14:50:30 -0800 Subject: Problem tylannitride 2004-01-28 14:50:30: still some particles Message-ID: From tberg at snf.stanford.edu Thu Jan 29 11:06:49 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Jan 2004 11:06:49 -0800 Subject: Comment tylannitride 2004-01-29 11:06:48: Slow pump interlock now functional Message-ID: The slow pump interlock was not functional. I have resolved this issue and it is now functioning correctly.ted From maurice at snf.stanford.edu Thu Jan 29 17:26:09 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Jan 2004 17:26:09 -0800 Subject: Shutdown tylannitride 2004-01-29 17:26:09: gate valve not opening in time Message-ID: Gate valve is not opening within 3min step time(step 10) of PUMP10 From mdickey at snf.stanford.edu Fri Jan 30 08:21:54 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Jan 2004 08:21:54 -0800 Subject: Problem tylannitride 2004-01-28 14:50:30: still some particles Message-ID: Replaced slow pump and adjusted time delay relay From mdickey at snf.stanford.edu Fri Jan 30 08:22:10 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Jan 2004 08:22:10 -0800 Subject: Problem tylannitride 2004-01-30 08:22:10: Report Problem for tylannitride Message-ID: SOme small particles From mdickey at snf.stanford.edu Fri Jan 30 08:25:08 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Jan 2004 08:25:08 -0800 Subject: Problem tylannitride 2004-01-30 08:22:10: Report Problem for tylannitride Message-ID: adjusted time delay relay From mdickey at snf.stanford.edu Fri Jan 30 08:25:28 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Jan 2004 08:25:28 -0800 Subject: Shutdown tylannitride 2004-01-29 17:26:09: gate valve not opening in time Message-ID: Adjusted time delay relay From mdickey at snf.stanford.edu Fri Jan 30 08:25:43 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Jan 2004 08:25:43 -0800 Subject: Comment tylannitride 2004-01-29 11:06:48: Slow pump interlock now functional Message-ID: Changed slow pump and adjusted time delay relay From mdickey at snf.stanford.edu Fri Jan 30 08:26:00 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Jan 2004 08:26:00 -0800 Subject: Problem tylannitride 2004-01-30 08:25:59: Particles Message-ID: There are still some small particles From maurice at snf.stanford.edu Fri Jan 30 14:11:33 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Jan 2004 14:11:33 -0800 Subject: Problem tylannitride 2004-01-30 08:25:59: Particles Message-ID: Test run after soft pump adjustment is good. Very few particles.