Comment tylannitride 2004-01-20 19:01:13: particle density higher on one side of all wafers

crichter at crichter at
Tue Jan 20 19:01:13 PST 2004

I did a NEWLSN run for 15 minutes. Two bare silicon, and 12 thermally grown oxide wafers were in this run. All wafers were positioned with the primary flat facing upward. After the run, the wafers were inspected under the dark field. All wafers showed a higher density of particles (bubbles?) near the flat and fewer particles at the opposite end......odd.

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