From maurice at snf.stanford.edu Thu Jul 1 16:58:00 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2004 16:58:00 -0700 Subject: Shutdown tylannitride SNF 2004-06-29 06:03:18: Pull and clean Message-ID: complete. test good From maurice at snf.stanford.edu Thu Jul 1 16:58:24 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Jul 2004 16:58:24 -0700 Subject: Comment tylannitride SNF 2004-06-25 11:29:07: pull and clean 6/29/04 Message-ID: complete From vossough at snf.stanford.edu Tue Jul 6 02:26:46 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Tue, 6 Jul 2004 02:26:46 -0700 Subject: Shutdown tylannitride SNF 2004-07-06 02:26:46: Does not pump down Message-ID: Tube stays at atmosphere and does not pump down. From tberg at snf.stanford.edu Tue Jul 6 06:38:12 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Jul 2004 06:38:12 -0700 Subject: Shutdown tylannitride SNF 2004-07-06 02:26:46: Does not pump down Message-ID: Found soft pump line off of gate valve. reinstalled checked out fine From xzhuan1 at snf.stanford.edu Tue Jul 6 16:02:01 2004 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Tue, 6 Jul 2004 16:02:01 -0700 Subject: Problem tylannitride SNF 2004-07-06 16:02:00: still have leakage problem Message-ID: run skipped to step 115 after step 30 From tberg at snf.stanford.edu Wed Jul 7 06:34:57 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 7 Jul 2004 06:34:57 -0700 Subject: Comment tylannitride SNF 2004-07-07 06:34:56: DCS alarm Message-ID: When i went in this morning DCS was in alarm i reset it and flow returned. I have no idea how long it was off.ted From tberg at snf.stanford.edu Wed Jul 7 06:35:28 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 7 Jul 2004 06:35:28 -0700 Subject: Problem tylannitride SNF 2004-07-06 16:02:00: still have leakage problem Message-ID: Replaced fitting on gate valve From yeh at snf.stanford.edu Thu Jul 8 12:34:15 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Thu, 8 Jul 2004 12:34:15 -0700 Subject: Comment tylannitride SNF 2004-07-08 12:34:14: poor uniformity Message-ID: target 6000A, 30min, LTO400 result 4500A - 7500A across 3 wafers in-wafer variation the same as above From vossough at snf.stanford.edu Mon Jul 12 03:06:00 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Mon, 12 Jul 2004 03:06:00 -0700 Subject: Shutdown tylannitride SNF 2004-07-12 03:05:59: failed leak test Message-ID: It would not pump down beyond 220mT. From mdickey at snf.stanford.edu Mon Jul 12 11:47:12 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 12 Jul 2004 11:47:12 -0700 Subject: Shutdown tylannitride SNF 2004-07-12 03:05:59: failed leak test Message-ID: Adjusted baritron....back in pump program......tube is basing at 25 m.t. From tberg at snf.stanford.edu Wed Jul 14 14:47:13 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 14 Jul 2004 14:47:13 -0700 Subject: Comment tylannitride SNF 2004-07-08 12:34:14: poor uniformity Message-ID: subsequent runs ok could be boat position From mdickey at snf.stanford.edu Thu Jul 15 13:07:11 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jul 2004 13:07:11 -0700 Subject: Shutdown tylannitride SNF 2004-07-15 13:07:09: Burnbox clean Message-ID: Tube can not be used until the burnbox is cleaned From mdickey at snf.stanford.edu Thu Jul 15 14:48:53 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jul 2004 14:48:53 -0700 Subject: Shutdown tylannitride SNF 2004-07-15 13:07:09: Burnbox clean Message-ID: Burnbox clean completed From tberg at snf.stanford.edu Thu Jul 22 10:08:46 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Jul 2004 10:08:46 -0700 Subject: Problem tylannitride 2004-06-10 06:52:43: possible particle problem Message-ID: No recent problems with particles- problem noted From tberg at snf.stanford.edu Thu Jul 22 10:13:51 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Jul 2004 10:13:51 -0700 Subject: Comment tylannitride SNF 2004-07-07 06:34:56: DCS alarm Message-ID: No further problems From seymour at snf.stanford.edu Fri Jul 23 08:34:14 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Jul 2004 08:34:14 -0700 Subject: Problem tylannitride 2004-02-19 16:28:34: NEWLSN still has particles Message-ID: Nancys NEWLSN run looked good removing the yellow light From tberg at snf.stanford.edu Fri Jul 30 08:45:22 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 30 Jul 2004 08:45:22 -0700 Subject: Shutdown tylannitride SNF 2004-07-30 08:45:21: Bad Pump Message-ID: Pump only pumps to 600 mT- replacing From tberg at snf.stanford.edu Fri Jul 30 13:34:00 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 30 Jul 2004 13:34:00 -0700 Subject: Comment tylannitride SNF 2004-07-30 13:33:59: Tube has a large leak Message-ID: Pump Replaced tube has a large leak.