Comment tylannitride SNF 2004-07-08 12:34:14: poor uniformity

yeh at snf.stanford.edu yeh at snf.stanford.edu
Thu Jul 8 12:34:15 PDT 2004


target 6000A, 30min, LTO400 
result 4500A - 7500A across 3 wafers
in-wafer variation the same as above




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