From vossough at snf.stanford.edu  Thu Jun  3 15:43:48 2004
From: vossough at snf.stanford.edu (vossough at snf.stanford.edu)
Date: Thu, 3 Jun 2004 15:43:48 -0700
Subject: Problem tylannitride 2004-06-03 15:43:47: MFS alarm
Message-ID: <mailman.552.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

Tried program LO378LSI for 2um deposition twice (Tuesday and Wednesday night) and it failed both times.
Tuesday---got 980 A instead of 20000 A
Wednesday---got 8000 A instead of 20000 A.



From rohits at snf.stanford.edu  Thu Jun 10 00:58:35 2004
From: rohits at snf.stanford.edu (rohits at snf.stanford.edu)
Date: Thu, 10 Jun 2004 00:58:35 -0700
Subject: Shutdown tylannitride 2004-06-10 00:58:34: won't pump down
Message-ID: <mailman.553.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

found the tube vented. Tried running the pump program, but it aborts and vents the tube.



From tberg at snf.stanford.edu  Thu Jun 10 06:50:25 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 10 Jun 2004 06:50:25 -0700
Subject: Problem tylannitride 2004-06-03 15:43:47: MFS alarm
Message-ID: <mailman.554.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

Observed for a week did not re-occur



From tberg at snf.stanford.edu  Thu Jun 10 06:51:52 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 10 Jun 2004 06:51:52 -0700
Subject: Shutdown tylannitride 2004-06-10 00:58:34: won't pump down
Message-ID: <mailman.555.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

Checked system manually pumped to base of 11  mT no problem leak rate ok. pump program ran fine.



From tberg at snf.stanford.edu  Thu Jun 10 06:52:49 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 10 Jun 2004 06:52:49 -0700
Subject: Problem tylannitride 2004-06-10 06:52:43: possible particle problem
Message-ID: <mailman.556.1357938951.26006.tylannitride-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Fri Jun 11 13:33:33 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 11 Jun 2004 13:33:33 -0700
Subject: Comment tylannitride 2004-06-11 13:33:33: Gate valve
Message-ID: <mailman.557.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

Installed new heated gate valve. Tested and it is ready for use



From maurice at snf.stanford.edu  Fri Jun 18 11:41:53 2004
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 18 Jun 2004 11:41:53 -0700
Subject: Comment tylannitride 2004-06-11 13:33:33: Gate valve
Message-ID: <mailman.558.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

heated gate valve installation-logged



From maurice at snf.stanford.edu  Fri Jun 25 11:29:07 2004
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 25 Jun 2004 11:29:07 -0700
Subject: Comment tylannitride SNF 2004-06-25 11:29:07: pull and clean 6/29/04
Message-ID: <mailman.559.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

FYI



From mdickey at snf.stanford.edu  Tue Jun 29 06:03:19 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 29 Jun 2004 06:03:19 -0700
Subject: Shutdown tylannitride SNF 2004-06-29 06:03:18: Pull and clean
Message-ID: <mailman.560.1357938951.26006.tylannitride-pcs@snf.stanford.edu>

System is down for a pull and clean