Problem tylannitride 2004-06-03 15:43:47: MFS alarm

vossough at snf.stanford.edu vossough at snf.stanford.edu
Thu Jun 3 15:43:48 PDT 2004


Tried program LO378LSI for 2um deposition twice (Tuesday and Wednesday night) and it failed both times.
Tuesday---got 980 A instead of 20000 A
Wednesday---got 8000 A instead of 20000 A.




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