From tberg at snf.stanford.edu Mon Mar 1 06:59:43 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Mar 2004 06:59:43 -0800 Subject: Shutdown tylannitride 2004-02-29 11:19:44: Could not pull the tube out Message-ID: Tube would not vent. REplaced soft pump valve. Checked pump down and vent fine From seymour at snf.stanford.edu Wed Mar 3 10:48:47 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 3 Mar 2004 10:48:47 -0800 Subject: Comment tylannitride 2004-03-03 10:48:45: Helium leak check Message-ID: I did a leak check as per request. I did not find any leaks. From yiching at snf.stanford.edu Thu Mar 4 16:30:06 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Thu, 4 Mar 2004 16:30:06 -0800 Subject: Problem tylannitride 2004-03-04 16:30:04: Failed leak check twice Message-ID: recipe: nitride2 From maurice at snf.stanford.edu Thu Mar 4 17:08:16 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Mar 2004 17:08:16 -0800 Subject: Shutdown tylannitride 2004-03-04 17:08:16: failed leakcheck Message-ID: Failed leak check twice. Fails in pump program also. From maurice at snf.stanford.edu Thu Mar 4 17:12:05 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Mar 2004 17:12:05 -0800 Subject: Comment tylannitride 2004-03-03 10:48:45: Helium leak check Message-ID: logged From maurice at snf.stanford.edu Thu Mar 4 17:12:20 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Mar 2004 17:12:20 -0800 Subject: Problem tylannitride 2004-03-04 16:30:04: Failed leak check twice Message-ID: logged From tberg at snf.stanford.edu Fri Mar 5 06:45:54 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Mar 2004 06:45:54 -0800 Subject: Shutdown tylannitride 2004-03-04 17:08:16: failed leakcheck Message-ID: New vacuum readout failed. replaced with old one and tested ok From yue at snf.stanford.edu Wed Mar 10 19:05:35 2004 From: yue at snf.stanford.edu (yue at snf.stanford.edu) Date: Wed, 10 Mar 2004 19:05:35 -0800 Subject: Shutdown tylannitride 2004-03-10 19:05:35: leak check 3 times. failed. Message-ID: From tberg at snf.stanford.edu Thu Mar 11 06:51:29 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Mar 2004 06:51:29 -0800 Subject: Shutdown tylannitride 2004-03-10 19:05:35: leak check 3 times. failed. Message-ID: secondary readout failedb again. Removed it Back to old method for now From ehkim at snf.stanford.edu Thu Mar 18 18:37:48 2004 From: ehkim at snf.stanford.edu (ehkim at snf.stanford.edu) Date: Thu, 18 Mar 2004 18:37:48 -0800 Subject: Problem tylannitride 2004-03-18 18:37:47: the tube didn't come out Message-ID: After finishing with the run, the tube didn't come out. Couldn't manually pull it out neither. 15 processed wafers inside. From tberg at snf.stanford.edu Fri Mar 19 07:16:42 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Mar 2004 07:16:42 -0800 Subject: Problem tylannitride 2004-03-18 18:37:47: the tube didn't come out Message-ID: soft pump valve clogged -replaced From vossough at snf.stanford.edu Sun Mar 21 23:03:46 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Sun, 21 Mar 2004 23:03:46 -0800 Subject: Comment tylannitride 2004-03-21 23:03:46: I got MFC alarm on friday night run, aborted the run. Message-ID: From mdickey at snf.stanford.edu Mon Mar 22 07:41:25 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 22 Mar 2004 07:41:25 -0800 Subject: Shutdown tylannitride 2004-03-22 07:41:25: Shutdown Message-ID: Down for pull and clean From maurice at snf.stanford.edu Wed Mar 24 15:10:52 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 Mar 2004 15:10:52 -0800 Subject: Shutdown tylannitride 2004-03-22 07:41:25: Shutdown Message-ID: tube pulled, cleaned, coated and tested. Uniformity good. Very few particles. Nitride2 looks good. From maurice at snf.stanford.edu Wed Mar 24 15:11:06 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 Mar 2004 15:11:06 -0800 Subject: Comment tylannitride 2004-03-21 23:03:46: I got MFC alarm on friday night run, aborted the run. Message-ID: logged From latta at snf.stanford.edu Fri Mar 26 11:39:30 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 26 Mar 2004 11:39:30 -0800 Subject: Shutdown tylannitride 2004-03-26 11:39:29: soft pump replaced. Message-ID: Needs leak check From seymour at snf.stanford.edu Fri Mar 26 13:08:17 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Mar 2004 13:08:17 -0800 Subject: Shutdown tylannitride 2004-03-26 11:39:29: soft pump replaced. Message-ID: Soft pump valve replaced and leak check passed From zappe at snf.stanford.edu Fri Mar 26 19:54:25 2004 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Fri, 26 Mar 2004 19:54:25 -0800 Subject: Problem tylannitride 2004-03-26 19:54:24: temperature Message-ID: During LONH378 run, deposition step, the Input TEMPS shows 400, the temperature at the tube display reads 626. The rest looks normal. From zappe at snf.stanford.edu Mon Mar 29 00:22:16 2004 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Mon, 29 Mar 2004 00:22:16 -0800 Subject: Problem tylannitride 2004-03-29 00:22:15: LONH378 Message-ID: More and bigger bubbles (particles) than ever before. High refractive index 2.4-2.8 according to ellipsometer. TEMPS shows 400, temperature gradient during deposition ?? Film thickness slightly higher than expected (1.45 um after 6h). From mdickey at snf.stanford.edu Mon Mar 29 08:30:41 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 29 Mar 2004 08:30:41 -0800 Subject: Problem tylannitride 2004-03-29 00:22:15: LONH378 Message-ID: Tightenend up source zone connections...back to set point From mdickey at snf.stanford.edu Mon Mar 29 08:31:31 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 29 Mar 2004 08:31:31 -0800 Subject: Problem tylannitride 2004-03-26 19:54:24: temperature Message-ID: Temperature is back to set point after tightening up source zone connections