Problem tylannitride 2004-03-18 18:37:47: the tube didn't come out

ehkim at snf.stanford.edu ehkim at snf.stanford.edu
Thu Mar 18 18:37:48 PST 2004


After finishing with the run, the tube didn't come out.
Couldn't manually pull it out neither.
15 processed wafers inside.




More information about the tylannitride-pcs mailing list