Problem tylannitride 2004-03-29 00:22:15: LONH378

[zappe at snf.stanford.edu]

More and bigger bubbles (particles) than ever before.
High refractive index 2.4-2.8 according to ellipsometer.
TEMPS shows 400, temperature gradient during deposition ??
Film thickness slightly higher than expected (1.45 um after 6h).