Problem tylannitride 2004-03-29 00:22:15: LONH378

zappe at zappe at
Mon Mar 29 00:22:16 PST 2004

More and bigger bubbles (particles) than ever before.
High refractive index 2.4-2.8 according to ellipsometer.
TEMPS shows 400, temperature gradient during deposition ??
Film thickness slightly higher than expected (1.45 um after 6h).

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