From chozone at snf.stanford.edu Wed Nov 3 22:22:57 2004 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Wed, 3 Nov 2004 22:22:57 -0800 Subject: Problem tylannitride SNF 2004-11-03 22:22:55: Pump Alarm Message-ID: There is alarm when I run the pump10 propram. From tberg at snf.stanford.edu Thu Nov 4 08:31:22 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Nov 2004 08:31:22 -0800 Subject: Shutdown tylannitride SNF 2004-11-04 08:31:20: Pump kicked off Message-ID: Replacing pump From seymour at snf.stanford.edu Thu Nov 4 09:57:44 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Nov 2004 09:57:44 -0800 Subject: Shutdown tylannitride SNF 2004-11-04 08:31:20: Pump kicked off Message-ID: pump replaced From seymour at snf.stanford.edu Thu Nov 4 09:58:22 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Nov 2004 09:58:22 -0800 Subject: Problem tylannitride SNF 2004-11-03 22:22:55: Pump Alarm Message-ID: pump failed From seymour at snf.stanford.edu Thu Nov 4 10:00:53 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Nov 2004 10:00:53 -0800 Subject: Shutdown tylannitride SNF 2004-11-04 10:00:52: replaced pump Message-ID: the pump has been replaced and checked out for base and leak rate. tube is over to Maurice for release to use. From maurice at snf.stanford.edu Thu Nov 4 10:29:38 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Nov 2004 10:29:38 -0800 Subject: Shutdown tylannitride SNF 2004-11-04 10:00:52: replaced pump Message-ID: pump replaced ...tube under observation From mdickey at snf.stanford.edu Tue Nov 9 06:26:50 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 9 Nov 2004 06:26:50 -0800 Subject: Shutdown tylannitride SNF 2004-11-09 06:26:49: Bottle change Message-ID: Down for DCS bottle change From mdickey at snf.stanford.edu Wed Nov 10 08:10:06 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 10 Nov 2004 08:10:06 -0800 Subject: Shutdown tylannitride SNF 2004-11-09 06:26:49: Bottle change Message-ID: DCS is back on line From mdickey at snf.stanford.edu Wed Nov 10 08:10:42 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 10 Nov 2004 08:10:42 -0800 Subject: Shutdown tylannitride SNF 2004-11-10 08:10:41: Test Message-ID: Process will determine if a test is needed after the bottle change From maurice at snf.stanford.edu Wed Nov 10 14:10:42 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Nov 2004 14:10:42 -0800 Subject: Shutdown tylannitride SNF 2004-11-10 08:10:41: Test Message-ID: Dep rate and uniformity good Very few partivles...good surface From maurice at snf.stanford.edu Wed Nov 10 14:10:57 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Nov 2004 14:10:57 -0800 Subject: Comment tylannitride SNF 2004-10-27 15:12:07: very few particles in dark field optics Message-ID: logged From maurice at snf.stanford.edu Wed Nov 10 14:11:42 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Nov 2004 14:11:42 -0800 Subject: Problem tylannitride SNF 2004-09-18 23:12:55: Large number of particles Message-ID: latest Nitride2 run looks good From mdickey at snf.stanford.edu Thu Nov 11 06:42:32 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 11 Nov 2004 06:42:32 -0800 Subject: Shutdown tylannitride SNF 2004-11-11 06:42:31: Power glitch Message-ID: Ammonia is not available at this time From seymour at snf.stanford.edu Thu Nov 11 06:59:33 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 11 Nov 2004 06:59:33 -0800 Subject: Shutdown tylannitride SNF 2004-11-11 06:42:31: Power glitch Message-ID: The power has been reset to the ammonia gas control panel in 115X. From kwang at snf.stanford.edu Thu Nov 11 14:31:17 2004 From: kwang at snf.stanford.edu (kwang at snf.stanford.edu) Date: Thu, 11 Nov 2004 14:31:17 -0800 Subject: Problem tylannitride SNF 2004-11-11 14:31:16: many many particles Message-ID: I ran it today and found 3 out of 4wafers were all covered by particles. The other one had many at edge, and some in the center. From jinyao at snf.stanford.edu Tue Nov 16 14:33:28 2004 From: jinyao at snf.stanford.edu (jinyao at snf.stanford.edu) Date: Tue, 16 Nov 2004 14:33:28 -0800 Subject: Problem tylannitride SNF 2004-11-16 14:33:27: still some particles Message-ID: With clean home made dummies; uniformity is good though From tberg at snf.stanford.edu Tue Nov 30 06:12:14 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 Nov 2004 06:12:14 -0800 Subject: Shutdown tylannitride SNF 2004-11-30 06:12:13: Pull And Clean Message-ID: Down for scheduled Pull and clean From tberg at snf.stanford.edu Tue Nov 30 15:00:54 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 Nov 2004 15:00:54 -0800 Subject: Problem tylannitride SNF 2004-11-11 14:31:16: many many particles Message-ID: noted and logged From tberg at snf.stanford.edu Tue Nov 30 15:02:12 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 Nov 2004 15:02:12 -0800 Subject: Comment tylannitride SNF 2004-11-30 15:02:12: Coat in progress Message-ID: Pull and clean completed Coat in progress