Problem tylannitride SNF 2004-11-11 14:31:16: many many particles

kwang at kwang at
Thu Nov 11 14:31:17 PST 2004

I ran it today and found 3 out of 4wafers were all covered by particles. The other one had many at edge, and some in the center.

More information about the tylannitride-pcs mailing list