From tberg at snf.stanford.edu Fri Oct 1 06:27:51 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 1 Oct 2004 06:27:51 -0700 Subject: Problem tylannitride SNF 2004-09-18 23:10:32: Leak Pressure is High Message-ID: tube change completed From fengj at snf.stanford.edu Fri Oct 8 17:40:58 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Fri, 8 Oct 2004 17:40:58 -0700 Subject: Shutdown tylannitride SNF 2004-10-08 17:40:57: TEMPL goes "B" Message-ID: Recipe was NITRIDE2. During STEP 20, TEMPL remains 400 while the other two kept rising to about 620. When STEP 25 was run for about 2 minutes, TEMPL suddenly changed to 682B, while the other two were around 650. The program was aborted and PUMP10 was loaded and run. From tberg at snf.stanford.edu Mon Oct 11 06:26:18 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2004 06:26:18 -0700 Subject: Shutdown tylannitride SNF 2004-10-08 17:40:57: TEMPL goes "B" Message-ID: Reseated thermocouple connector-B is gone From mdickey at snf.stanford.edu Tue Oct 26 13:30:47 2004 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Tue, 26 Oct 2004 13:30:47 -0700 Subject: Bottle change Message-ID: <417EB3F6.3FC3B669@snf.stanford.edu> This message is to let all potential users of the Tylan Nitride tube that we will be changing the Dichlorsilane bottle on Nov. 12......(tuesday) The tube will be down for a 24 hour leak check. It will most likely be done in the morning. Please plan accordingly. From mdickey at snf.stanford.edu Tue Oct 26 14:04:58 2004 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Tue, 26 Oct 2004 14:04:58 -0700 Subject: [Fwd: Date correction] Message-ID: <417EBBFA.A5FE78A@snf.stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: Mike Dickey Subject: Date correction Date: Tue, 26 Oct 2004 13:36:02 -0700 Size: 1190 URL: From qwang at snf.stanford.edu Wed Oct 27 15:12:07 2004 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Wed, 27 Oct 2004 15:12:07 -0700 Subject: Comment tylannitride SNF 2004-10-27 15:12:07: very few particles in dark field optics Message-ID: Exchanged 4 new dummies and used LONH378 for 1000A thick film. The measurement result range from 1025A to 1050A by 5 points. Good result