Shutdown tylannitride SNF 2004-10-08 17:40:57: TEMPL goes "B"

fengj at fengj at
Fri Oct 8 17:40:58 PDT 2004

Recipe was NITRIDE2. During STEP 20, TEMPL remains 400 while the other two kept rising to about 620. When STEP 25 was run for about 2 minutes, TEMPL suddenly changed to 682B, while the other two were around 650. The program was aborted and PUMP10 was loaded and run.

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