Comment tylannitride SNF 2004-10-27 15:12:07: very few particles in dark field optics

qwang at qwang at
Wed Oct 27 15:12:07 PDT 2004

Exchanged 4 new dummies and used LONH378 for 1000A thick film. The measurement result range from 1025A to 1050A by 5 points. Good result

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