Comment tylannitride SNF 2004-10-27 15:12:07: very few particles in dark field optics

qwang at snf.stanford.edu qwang at snf.stanford.edu
Wed Oct 27 15:12:07 PDT 2004


Exchanged 4 new dummies and used LONH378 for 1000A thick film. The measurement result range from 1025A to 1050A by 5 points. Good result




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