From xiajing at snf.stanford.edu Wed Sep 1 01:12:08 2004 From: xiajing at snf.stanford.edu (xiajing at snf.stanford.edu) Date: Wed, 1 Sep 2004 01:12:08 -0700 Subject: Problem tylannitride SNF 2004-09-01 01:12:07: same leak checking problem Message-ID: jump from 35 to 110/115 in lonh378 and nitride2 From xiajing at snf.stanford.edu Wed Sep 1 01:14:27 2004 From: xiajing at snf.stanford.edu (xiajing at snf.stanford.edu) Date: Wed, 1 Sep 2004 01:14:27 -0700 Subject: Comment tylannitride SNF 2004-09-01 01:14:26: same leakcheck problem Message-ID: in nitride2 and lonh378 From mdickey at snf.stanford.edu Wed Sep 1 07:28:29 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Sep 2004 07:28:29 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 07:28:28: Pump down problem Message-ID: Looking into pumpdown problem From mdickey at snf.stanford.edu Wed Sep 1 10:02:08 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Sep 2004 10:02:08 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 07:28:28: Pump down problem Message-ID: Cleaned clogged slow pump.....tested system and now it is working fine From mdickey at snf.stanford.edu Wed Sep 1 10:02:30 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Sep 2004 10:02:30 -0700 Subject: Comment tylannitride SNF 2004-09-01 01:14:26: same leakcheck problem Message-ID: Problem fixed by cleaning slow pump From mdickey at snf.stanford.edu Wed Sep 1 10:02:55 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Sep 2004 10:02:55 -0700 Subject: Problem tylannitride SNF 2004-09-01 01:12:07: same leak checking problem Message-ID: Clogged slow pump fixed From mdickey at snf.stanford.edu Wed Sep 1 10:03:48 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Sep 2004 10:03:48 -0700 Subject: Problem tylannitride SNF 2004-08-31 19:03:47: No deposition possible Message-ID: Slow pump problem fixed From maurice at snf.stanford.edu Wed Sep 1 10:39:18 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Sep 2004 10:39:18 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 10:39:17: failed leakcheck Message-ID: From mdickey at snf.stanford.edu Wed Sep 1 11:14:51 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Sep 2004 11:14:51 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 10:39:17: failed leakcheck Message-ID: Found loose screw on door plate........back in process From maurice at snf.stanford.edu Wed Sep 1 14:02:46 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Sep 2004 14:02:46 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 14:02:45: failed leakcheck in pump program Message-ID: From seymour at snf.stanford.edu Wed Sep 1 15:08:39 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Sep 2004 15:08:39 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 14:02:45: failed leakcheck in pump program Message-ID: Mike rebuilt the loader. The tube is running the pump recipe From yyao at snf.stanford.edu Wed Sep 1 16:03:59 2004 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Wed, 1 Sep 2004 16:03:59 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 16:03:57: base pressure failed Message-ID: From mdickey at snf.stanford.edu Thu Sep 2 07:08:04 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 2 Sep 2004 07:08:04 -0700 Subject: Shutdown tylannitride SNF 2004-09-01 16:03:57: base pressure failed Message-ID: Found pump off. System back in pump program From gladys at snf.stanford.edu Thu Sep 2 08:04:05 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Thu, 2 Sep 2004 08:04:05 -0700 Subject: Shutdown tylannitride SNF 2004-09-02 08:04:05: failed leak check, waiting for a testrun Message-ID: From mdickey at snf.stanford.edu Thu Sep 2 10:58:16 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 2 Sep 2004 10:58:16 -0700 Subject: Comment tylannitride SNF 2004-09-02 10:58:12: 50 slot boat Message-ID: The middle 50 slot boat has one slot in the middle of the boat that is chipped. The boat is still useable and replacement are going to be ordered. From maurice at snf.stanford.edu Thu Sep 2 16:39:07 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Sep 2004 16:39:07 -0700 Subject: Shutdown tylannitride SNF 2004-09-02 08:04:05: failed leak check, waiting for a testrun Message-ID: loader rebuilt. System tested 4 times. ok From yetao at snf.stanford.edu Wed Sep 15 02:48:18 2004 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Wed, 15 Sep 2004 02:48:18 -0700 Subject: Shutdown tylannitride SNF 2004-09-15 02:48:18: tube doesn't come out Message-ID: have 2 wafers in the tube, please try to rescure them and put them back to the cassette named "Eric Tao". Thanks. From mdickey at snf.stanford.edu Wed Sep 15 07:11:51 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 15 Sep 2004 07:11:51 -0700 Subject: Shutdown tylannitride SNF 2004-09-15 02:48:18: tube doesn't come out Message-ID: Cleaned up slow pump valve and tested boat in and out. System ready for use. From maurice at snf.stanford.edu Wed Sep 15 14:58:47 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Sep 2004 14:58:47 -0700 Subject: Shutdown tylannitride SNF 2004-09-15 14:58:47: not pumping down Message-ID: slow pump on but gate valve not opening From tberg at snf.stanford.edu Wed Sep 15 15:16:53 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 15 Sep 2004 15:16:53 -0700 Subject: Shutdown tylannitride SNF 2004-09-15 14:58:47: not pumping down Message-ID: Restarted recipe and it pumped down fine From fengj at snf.stanford.edu Thu Sep 16 09:55:44 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Thu, 16 Sep 2004 09:55:44 -0700 Subject: Problem tylannitride SNF 2004-09-16 09:55:42: MFS Error 08 Message-ID: From fengj at snf.stanford.edu Thu Sep 16 09:59:18 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Thu, 16 Sep 2004 09:59:18 -0700 Subject: Shutdown tylannitride SNF 2004-09-16 09:59:14: Failed Leak Check at Step 35 Message-ID: From mdickey at snf.stanford.edu Thu Sep 16 10:34:35 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Sep 2004 10:34:35 -0700 Subject: Shutdown tylannitride SNF 2004-09-16 09:59:14: Failed Leak Check at Step 35 Message-ID: Found the pump off and clutch cable loose. Running a test From mdickey at snf.stanford.edu Thu Sep 16 10:34:48 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Sep 2004 10:34:48 -0700 Subject: Problem tylannitride SNF 2004-09-16 09:55:42: MFS Error 08 Message-ID: Pump was off From fengj at snf.stanford.edu Sat Sep 18 23:10:32 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 18 Sep 2004 23:10:32 -0700 Subject: Problem tylannitride SNF 2004-09-18 23:10:32: Leak Pressure is High Message-ID: Leak Pressure is 59.5. It has been increasing since yesterday, as can be seen from the several records in the log book. From fengj at snf.stanford.edu Sat Sep 18 23:12:55 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 18 Sep 2004 23:12:55 -0700 Subject: Problem tylannitride SNF 2004-09-18 23:12:55: Large number of particles Message-ID: 6 out of 6 wafers have large number of particles, and yesterday's ratio is 7 out of 10. From mdickey at snf.stanford.edu Mon Sep 20 14:48:47 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 20 Sep 2004 14:48:47 -0700 Subject: Comment tylannitride SNF 2004-09-02 10:58:12: 50 slot boat Message-ID: Boat has been replaced From mdickey at snf.stanford.edu Wed Sep 29 05:59:05 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 29 Sep 2004 05:59:05 -0700 Subject: Shutdown tylannitride SNF 2004-09-29 05:59:04: pull and clean Message-ID: System down for pull and clean From mdickey at snf.stanford.edu Thu Sep 30 07:22:28 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 30 Sep 2004 07:22:28 -0700 Subject: Comment tylannitride SNF 2004-09-30 07:22:27: In coat Message-ID: Pull and clean is done. In coat recipe. From maurice at snf.stanford.edu Thu Sep 30 14:39:41 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Sep 2004 14:39:41 -0700 Subject: Comment tylannitride SNF 2004-09-30 07:22:27: In coat Message-ID: logged From maurice at snf.stanford.edu Thu Sep 30 14:41:01 2004 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Sep 2004 14:41:01 -0700 Subject: Shutdown tylannitride SNF 2004-09-29 05:59:04: pull and clean Message-ID: pulled and cleaned. Uniformity and growthrate good. Bad Particles