Problem tylannitride SNF 2004-09-18 23:12:55: Large number of particles

fengj at snf.stanford.edu fengj at snf.stanford.edu
Sat Sep 18 23:12:55 PDT 2004


6 out of 6 wafers have large number of particles, and yesterday's ratio is 7 out of 10.




More information about the tylannitride-pcs mailing list