From tberg at snf.stanford.edu Mon Apr 4 06:11:17 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 4 Apr 2005 06:11:17 -0700 Subject: Shutdown tylannitride SNF 2005-04-04 06:11:16: Pull and clean Message-ID: From maurice at snf.stanford.edu Wed Apr 6 14:59:42 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2005 14:59:42 -0700 Subject: Shutdown tylannitride SNF 2005-04-04 06:11:16: Pull and clean Message-ID: pulled, cleaned, coated and test. Tube up From maurice at snf.stanford.edu Wed Apr 6 15:00:36 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2005 15:00:36 -0700 Subject: Comment tylannitride SNF 2005-03-29 07:26:08: Oil Change Message-ID: noted From cbellew at snf.stanford.edu Tue Apr 12 17:38:00 2005 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Tue, 12 Apr 2005 17:38:00 -0700 Subject: Problem tylannitride SNF 2005-04-12 17:37:59: High deposition pressure Message-ID: During the deposition step of NITRIDE2, the pressure was much higher than usual, ~470mTorr instead of ~280. Base pressure and leakback were normal. Gas flows (according to Tycom monitor) were normal. From maurice at snf.stanford.edu Wed Apr 13 12:32:05 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Apr 2005 12:32:05 -0700 Subject: Shutdown tylannitride SNF 2005-04-13 12:32:05: load zone not reading reading Message-ID: there is a user run inside the tube it is holding in step 55 From mdickey at snf.stanford.edu Wed Apr 13 13:11:54 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Apr 2005 13:11:54 -0700 Subject: Shutdown tylannitride SNF 2005-04-13 12:32:05: load zone not reading reading Message-ID: Zone is back in......took recipe off of hold and it is now in dep From zappe at snf.stanford.edu Thu Apr 14 16:22:09 2005 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Thu, 14 Apr 2005 16:22:09 -0700 Subject: Problem tylannitride SNF 2005-04-14 16:22:08: Wafer stuck in tube Message-ID: Gate valve is stuck. 3 mm thick wafer inside the tube. Please drive wafer out extremely slowly (within at least 20 minutes). Otherwise wafer might shatter. From fengj at snf.stanford.edu Thu Apr 14 19:05:45 2005 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Thu, 14 Apr 2005 19:05:45 -0700 Subject: Shutdown tylannitride SNF 2005-04-14 19:05:44: tube will not come out Message-ID: From mdickey at snf.stanford.edu Fri Apr 15 08:15:13 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 15 Apr 2005 08:15:13 -0700 Subject: Shutdown tylannitride SNF 2005-04-14 19:05:44: tube will not come out Message-ID: Cleaned clogged slow pump. Vents fine now From mdickey at snf.stanford.edu Fri Apr 15 08:15:39 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 15 Apr 2005 08:15:39 -0700 Subject: Problem tylannitride SNF 2005-04-14 16:22:08: Wafer stuck in tube Message-ID: Wafers should be accessible now From grupp at snf.stanford.edu Fri Apr 15 19:35:53 2005 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Fri, 15 Apr 2005 19:35:53 -0700 Subject: Problem tylannitride SNF 2005-04-15 19:35:53: NO DEPOSITION!!! Message-ID: ran LONH378 15 min. no nitride deposited. didn't wathc pressures. doh! From seymour at snf.stanford.edu Mon Apr 18 09:23:23 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 Apr 2005 09:23:23 -0700 Subject: Comment tylannitride SNF 2005-04-18 09:23:23: DEPOSITION ISSUE Message-ID: I checked system operation in manule. Base and leak rete good. I used NH3 @ 25 sccm, DCS @ 150 sccm, process pressure was 500 mT. The recipe Dan used has an upper pressure limit of 1200 mT. I can not determine what caused hyis deposition failure. From maurice at snf.stanford.edu Mon Apr 18 17:26:40 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Apr 2005 17:26:40 -0700 Subject: Problem tylannitride SNF 2005-04-15 19:35:53: NO DEPOSITION!!! Message-ID: Dan Grupp repeated his run. It came out ok. From tberg at snf.stanford.edu Thu Apr 21 06:32:56 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Apr 2005 06:32:56 -0700 Subject: Comment tylannitride SNF 2005-04-18 09:23:23: DEPOSITION ISSUE Message-ID: Noted From tberg at snf.stanford.edu Thu Apr 21 06:34:11 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Apr 2005 06:34:11 -0700 Subject: Problem tylannitride SNF 2005-04-12 17:37:59: High deposition pressure Message-ID: High Dep pressure is probably due to tube with smaller holes going to gas ring. Dep rate, RI, uniformity OK From yetao at snf.stanford.edu Fri Apr 22 00:19:10 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Fri, 22 Apr 2005 00:19:10 -0700 Subject: Problem tylannitride SNF 2005-04-22 00:19:09: might be some leak, tube came out before dep Message-ID: From king at snf.stanford.edu Mon Apr 25 21:54:21 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 25 Apr 2005 21:54:21 -0700 Subject: Problem tylannitride SNF 2005-04-25 21:54:21: tylan nitride- particles Message-ID: Large particles on the sled- looks like deposition is delaminating. From seymour at snf.stanford.edu Fri Apr 29 07:36:23 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Apr 2005 07:36:23 -0700 Subject: Problem tylannitride SNF 2005-04-22 00:19:09: might be some leak, tube came out before dep Message-ID: tube used after this with no vacuum problems From maurice at snf.stanford.edu Fri Apr 29 16:49:06 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Apr 2005 16:49:06 -0700 Subject: Comment tylannitride SNF 2005-04-29 16:49:05: New dummies added Message-ID: Replaced dummies particles on Nitride2 recipe