Problem tylannitride SNF 2005-04-12 17:37:59: High deposition pressure

cbellew at snf.stanford.edu cbellew at snf.stanford.edu
Tue Apr 12 17:38:00 PDT 2005


During the deposition step of NITRIDE2, the pressure was
much higher than usual, ~470mTorr instead of ~280.  Base
pressure and leakback were normal.  Gas flows (according
to Tycom monitor) were normal.




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