Problem tylannitride SNF 2005-04-14 16:22:08: Wafer stuck in tube
zappe at snf.stanford.edu
zappe at snf.stanford.edu
Thu Apr 14 16:22:09 PDT 2005
Gate valve is stuck. 3 mm thick wafer inside the tube. Please drive wafer out extremely slowly (within at least 20 minutes). Otherwise wafer might shatter.
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