Comment tylannitride SNF 2005-04-18 09:23:23: DEPOSITION ISSUE

[seymour at snf.stanford.edu]

I checked system operation in manule. Base and leak rete good. I used NH3 @  25 sccm, DCS @ 150 sccm, process pressure was 500 mT. The recipe Dan used has an upper pressure limit of 1200 mT. I can not determine what caused hyis deposition failure.