Comment tylannitride SNF 2005-04-18 09:23:23: DEPOSITION ISSUE

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Apr 18 09:23:23 PDT 2005


I checked system operation in manule. Base and leak rete good. I used NH3 @  25 sccm, DCS @ 150 sccm, process pressure was 500 mT. The recipe Dan used has an upper pressure limit of 1200 mT. I can not determine what caused hyis deposition failure.




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